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BAF,MDL DM,LW EDGE ELECT,4520, Rev.A
Plate,Upper Bfl 4"Edge, Rev.2
Plate Lower Baffle 6"
Assy,Harn,Status,Pump,Chamber, Rev.A
Plate Upper Baffle
Hose, Coiled 4600
ASSY,PWR SPLY,ESC 9600
Plate,Lwr Bfl 4" Edge Bld I.O.
Melsec Programmable Controller
Melsec PLC Module
Cap Lower Electrode 4", Rev.C
PLATE SEAL LOWER NIT
Multiflo Mass Flow Controller, Range: 500SCCM, Gas: NH3, C8161-792806
ATX Server Motherboard Intel Pentium 4, Rev 2.01
Mitsubishi Melsec PLC Programmable Controller, AC85-264V, 50/60Hz, 60VA Max
Assy Harn Adapter Gas Box, Rev.B
Pilz PNOZ 3 24VDC 5S10 Safety Relay
Gasket, Drain Pipe, Bowl
Screw Mount Slotted Optical Switch, RS 303-1192, Lot of 4
(E)RF Driver, PCB, Rev.6