Available Second-hand Semiconductor Process Chambers for Sale


AMAT Endura II Enhanced CVD TxZ 12" chamber

 

Condition: "as-is"   
Tool Model : AMAT Endura II 300mm PECVD TxZ Process chamber
Process chamber is 100% complete and was fully operational prior decommissioning
Including: compled cleaned process kit and onboard Gasbox

AMAT Centura High K PECVD chamber

 

Condition: "as-is"   
Tool Model : AMAT Centura 200mm PECVD Process chamber
Process chamber is 100% complete and was fully operational prior decommissioning
Including: gas box, remote rack and all interfacing

AMAT Centura MXP chamber

 

Condition: "as-is"
200 mm ESC
Complete including turbo and RF-match.

Axcelis Fusion ES3 12" chamber

 

Condition: "as-is"   
Tool Model : Axcelis Fusion ES3 
Process chamber is 100% complete and was fully operational prior decommissioning

LAM - A6 9400 DSIE III Deep Silicon Etch chamber

 

Condition: “As is” 
Serial number: 94-1602  
Date of manufacture: 2008 Refurbished and upgraded to DSIE III by LAM in 2015
Wafer size 200mm  

TEL - Tactras RLSA Etch chamber

 

Condition: “As is” 
Serial number: CVM00025
Date of manufacture: 2012
Wafer size 300mm 

TEL - Tokyo Electron LEAGA RST chamber

 

Condition: “As is” 
Serial number: PJ105
Date of manufacture: 2018
Wafer size 300mm  

HITACHI M712 / M711 Alu Dry Etch Process chamber

 

Condition: “As is” 
Serial number: 
Date of manufacture: 2006
Wafer size 300mm  

HITACHI M712 / M711 Dry Etch Strip chamber

 

Condition: “As is” 
Serial number: 
Date of manufacture: 2006
Wafer size 300mm