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  • SOS Group
Contact Us
  • OEM
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  1. Products
  2. CHAMBER PARTS
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Price - Low to High Price - High to Low Newest arrivals Name
[715-330834-002/800278] LOWER CHAMBER HOUSING
LOWER CHAMBER HOUSING
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[0040-39154/700528] RF PLATE, CHAMBER LID, REV 003
RF PLATE, CHAMBER LID, REV 003
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[0041-25378/700525] RF PLATE, CHAMBER LID, REPACKAGE CVD/ALD, REV 03
RF PLATE, CHAMBER LID, REPACKAGE CVD/ALD, REV 03
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[0041-25378/700523] RF PLATE, CHAMBER LID, REPACKAGE CVD/ALD, REV 03
RF PLATE, CHAMBER LID, REPACKAGE CVD/ALD, REV 03
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[0040-85406/700068] CHAMBER LID HINGE, REV 003
CHAMBER LID HINGE, REV 003
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[0040-80625/700066] CHAMBER HINGE BRACKET, LEFT / RIGHT, REV 003
CHAMBER HINGE BRACKET, LEFT / RIGHT, REV 003
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[1187-028350-18/602563] HEATER CHAMBER VMM-40-104
HEATER CHAMBER VMM-40-104
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[0010-13833/700089] CHAMBER, UPPER, DPS A3 (0020-33806 REV. P2)
CHAMBER, UPPER, DPS A3 (0020-33806 REV. P2)
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[715-330445-004/200850] UPPER CHAMBER DEFIN., REV B
UPPER CHAMBER DEFIN., REV B
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[280251/200629] SHOWER HEAD-QTZ, PROCESS CHAMBER, NEW OEM
SHOWER HEAD-QTZ, PROCESS CHAMBER, NEW OEM
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[853-495013-001/200260] LINER CHAMBER VAT 65 TRNSN-MANF 7714
LINER CHAMBER VAT 65 TRNSN-MANF 7714
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[189660/508417] SHIELD CHAMBER ASSY  SIGMA FXP  A89660A02, NEW OEM
SHIELD CHAMBER ASSY SIGMA FXP A89660A02, NEW OEM
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[169540/507904] ICP CHAMBER LID, REV E
ICP CHAMBER LID, REV E
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[10135099/508004] LINE 00020 CHAMBER INSERT, NEW OEM
LINE 00020 CHAMBER INSERT, NEW OEM
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[0020-05327/507213] Blocker, Baffle Clean Port Ultima HDP-CVD
Blocker, Baffle Clean Port Ultima HDP-CVD
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[4710.0070.0001/507206] Arc Chamber Mounting Block Filament End
Arc Chamber Mounting Block Filament End
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[40602/507840] Arc Chamber Top, Axcelis 1717480, Lot of 3
Arc Chamber Top, Axcelis 1717480, Lot of 3
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[4710-0069-0001/506653] Mount Arc Chamber Repeller Side, Rev.C
Mount Arc Chamber Repeller Side, Rev.C
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[6079970 / 506651] CHAMBER ARC PINNED FOR 8250
CHAMBER ARC PINNED FOR 8250
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[DL63-A-124/503959] ARC CHAMBER BODY
ARC CHAMBER BODY
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