Available Second-hand Semiconductor Process Chambers for Sale


AMAT Endura II Enhanced CVD TxZ 12" chamber

 

Condition: "as-is"   
Tool Model : AMAT Endura II 300mm PECVD TxZ Process chamber
Process chamber is 100% complete and was fully operational prior decommissioning
Including: compled cleaned process kit and onboard Gasbox

AMAT Centura High K PECVD chamber

 

Condition: "as-is"   
Tool Model : AMAT Centura 200mm PECVD Process chamber
Process chamber is 100% complete and was fully operational prior decommissioning
Including: gas box, remote rack and all interfacing

AMAT Centura MXP chamber

 

Condition: "as-is"
200 mm ESC
Complete including turbo and RF-match.

TEL - Tokyo Electron LEAGA RST chamber

 

Condition: “As is” 
Serial number: PJ105
Date of manufacture: 2018
Wafer size 300mm  

TEL - Tactras RLSA Etch chamber

 

Condition: “As is” 
Serial number: CVM00025
Date of manufacture: 2012
Wafer size 300mm 

HITACHI M712 / M711 Alu Dry Etch Process chamber

 

Condition: “As is” 
Serial number: 
Date of manufacture: 2006
Wafer size 300mm  

HITACHI M712 / M711 Dry Etch Strip chamber

 

Condition: “As is” 
Serial number: 
Date of manufacture: 2006
Wafer size 300mm  

VEECO MaxBright TurboDisk MOCVD chamber

 

Condition: “As is” 
Serial number:  
Date of manufacture: 2011
Wafer size 300mm