Lam Research spares
Part no
Description
(NOT SET)
CABLE CH.5 SCP
(NOT SET)
COVER PLATE CHUCK
(NOT SET)
SWITCH FLOW SWITCH FLOW:SE32
(NOT SET)
FUSE HOLDER 250V 10A 63 SIZE, 10MM2 WEIDMULLER SAKS 6
(NOT SET)
GASBOX COVER COVER GAS BOX COMPLETE
(NOT SET)
HOLDER WAFER HOLDER ELL
(NOT SET)
KEYBOARD HP
(NOT SET)
MASS FLOW CONTROLLER TYLAN FC-2900V 100 SCCM CF4
(NOT SET)
MASS FLOW CONTROLLER TYLAN FC-2900V 100 SCCM CF4
(NOT SET)
MASS FLOW CONTROLLER TYLAN FC-2900V 100 SCCM CF4
(NOT SET)
MASS FLOW CONTROLLER TYLAN FC-2900V 200 SCCM CHF3
(NOT SET)
POWER SUPPLY, POWER ONE, INPUT: 110-230VAC OUTPUT: 5VDC-70A, 2X 12VDC-10A, 24VDC-7A, 450W.
(NOT SET)
ROTARY ACTUATOR SMC ECRB50-270 CRB ROTARY ACTUATOR ($137.10 NIEUW)
(NOT SET)
ROTARY ACTUATOR CRB ROTARY ACTUATOR ECRB80-270 ($173.65 NIEUW)
(NOT SET)
SENSOR OMRON EE-SPY412
(NOT SET)
SENSOR MOUNTING D-C73
(NOT SET)
CERAMIC UNIFORMITY RING SHORT
(NOT SET)
SOLENOID VALVE NVJ314M 20-100PSI
(NOT SET)
ROLLER CHAIN SPROCKET 25B 26-5/8 TYPE B SINGLE HUB STEEL 2.873 PD 1/8" KEYWAY
(NOT SET)
KIT PM QTRLY ISO MOD LAM 4520
(NOT SET)
CHAMBER LAM 4520 OXIDE HIGH CONDUCTIVE CHAMBER ASSY COMPLETE
(NOT SET)
CHAMBER LAM 4420 POLY CHAMBER COMPLETE
(NOT SET)
CERAMIC EDGE RING CERAMIC 8" NOTCH
(NOT SET)
CIRCUIT BREAKER SAFETY CIRCUIT BREAKER SINGLE POLE
(NOT SET)
REMOTE AC BOX LAM RESEARCH
(NOT SET)
CONTROL BOX EMPTY CONTROL BOX LAM RESEARCH
(NOT SET)
CONTROLLER ALLIANCE A6 INCLUDING CABLING
(NOT SET)
COMPUTER MOUSE/TRACK MODEL LAM 4520 B-5XXMP A0002
(NOT SET)
CIRCUIT BREAKER SAFETY CIRCUIT BREAKER THREE POLE
(NOT SET)
TRANSISTOR DARLINGTON NPN 4A 60V, DUAL HFE:500, 3-PIN, TO-220 FOR SOLENOID INTERFACE BOARD REPLACEMENT COMPONENTS
(NOT SET)
FILTER CARTRIDGE, RESIN, DI FOR LAM
(NOT SET)
CASSETTE HOLDER LAM INDEXERS
(NOT SET)
END EFFECTOR BROOKS AUTOMATION 200MM
(NOT SET)
SOCKET, IDC, 50WAY 3425-6000
(NOT SET)
WAFERHOLDER HOLDER WAFER 8" ARM REV C
(NOT SET)
LIFT FOR WAFER LAM490
(NOT SET)
FLOW SENSOR WITH DIGITAL READOUT RANGE: 4-40 L/MIN, OUTPUT: DC4 - 20MA
(NOT SET)
EVH 6 FLARE 3/8IN MULTI 12 SOLENOID VALVE EXCL COIL (LAM 690)
(NOT SET)
FILTER HOUSING MILLIPORE DI CARTRIDGE
(NOT SET)
HEATED TUBE WITH KF40 FLANGE 13CM, ISOTROPIC CHAMBER
(NOT SET)
TRANSFORMER AC/AC CONVERTER TCP, 3AC 400V / 3AC 208V, LAM TCP2/E0101, 35KA
(NOT SET)
ADAPTEC 916506-01 SCSI CARD WITH PCI INTERFACE
005-19
SHAFT ROLLER DRIVE, 1001045607, 0001179457
044-612
PCB BACKPLANE INTERFACE 44XX 044-612
111-111
ELECTRODE TOP SHIELD
12-8800-013
FIBER OPTICS ASSY FIBER OPTICS MOD PRE-PROD
12-8800-048
MOTOR ASSY CBL ROLLER MOTOR CE
12-8892-010
MOTOR 25 VCD 500CPR
12-8892-026
LAM ONTRAK DC MOTOR INPUT X PORT
13-8000-197
HOUSING,ROLLER ASSY
13-8892-059-01
SHAFT ROLLER SHORT
14-8882-016
MOTOR HRNSS.SPNDL.MTR,PRE-POD E288 14-8882-016 . MOTOR
231-022501-001
FIBER OPTICS MOD, FIBEROPTIC PLST, M3X0.5
231-022502-001
MODIFICATION, FIBER-OPTIC, PLASTIC, M4 X 0.7
26-0200-056
KIT SEMI-ANNUAL PM,SERIES-2
272072-00
PCB DISKDRIVE CONTROLLER
30-0008-026
O-RING AS135 1.925 ID X .103 W,POLY 48,90 ID X 2,62
30-0028-001
POWER SUPPLY, SSI, SQM200-1333-7, INPUT:120-240VAC, 400W, OUTPUT: V1=5VDC, V2=15VDC, V3,V4=15VDC
515-012168-006
TOOLS DISC, CALIB ARM TIGHT POCKET 6' (SEE NOTES!)
515-012169-001
TOOL WAFER CENTERING
515-025713-006
KIT CALIBRATION ASSY H/W STRIPPER DISK 6" DISK, CALB, PINNED LIFTER, STRIP, PIN LOCKING 0.25/S/S25GRIP 515-009821-001 DISK 515-025713-006
515-025714-006
DISK TOOL DISK PINNED LIFTER
515-250015-006
DISK, CALN, PINNED LFTR
515-550511-001
TOOL,LIP,SEAL,REMOVAL
518-093760-001
THERMOMETER -20 TO 110C
518-093761-001
TOOLS CYLN,HYD SIZE/CAP 50 ML 25 X 150MM
518-093762-001
HYDROMETER 1,000/1,225 SPGR 150MM VWRBRAND CAT.NO.34623-106
605-016006-001
PCB EXPANSION BOARD
605-092549-001
PCB VIDEO EISA
605-092874-001
PCB DRAM SIMMS 16MB
627-002926-001
TRANS TRW PHOTO
644-000467-001
RELAY, POTTER & BRUMFIELD, R10-E1Z2-V700, COILV: 24VDC, DPDT, 120VAC, PLUG-IN.
644-000731-010
RELAY, SOLID STATE, TELEDYNE SSP, 601-2, COILV: 32VDC, SPST, 250VAC, PANEL MOUNT.
644-005878-001
RELAY, POTTER & BRUMFIELD, R10-E1Z4-V700, COILV: 28VCD, 4PDT, 120VAC, PLUG-IN MOUNT.
645-097564-003
SWITCH TEMPERATURE 140 DEG C
658-001778-002
BUZZER ADIBLE SIGNAL SC110 30-120 VAC 4-16MAT
660-007612-001
POWER SUPPLY, PIONEER MAGNETICS, PM 2500A-1, INPUT: 115VAC/12,8A, OUTPUT: 24VDC/40A.
660-007613-001
POWER SUPPLY. PIONEER MAGNETICS. PM2675A-1-3 INPUT:115VAC. OUTPUT:5VDC/20A, 15VDC/10A, 15VDC/10A.
660-091820-003
POWER SUPPLY OMEGA, MG2-1F-1F-C INPUT: 95-250VAC 15A 50-60HZ. OUTPUT: 2X 24VDC 25A
661-061183-001
LAMP 120V T1.75
662-003955-001
LED IR ENTRANCE LIFTER
665-400264-001
THETA BELT
668-007552-010
RECEPTICAL,BANANA JACK BLACK
668-008381-035
CONN HOOD D-TYPE RFI/EMI.500
669-000676-001
CONTACT PIN TERMINAL MALE 24-30GA 5A CRIM
669-000677-001
CONTACT PIN TERMINAL FEMALE 24GA 5A CRIM
669-001244-001
CONTACT PIN TERMINAL MALE 18GA 5A CRIM
669-001245-001
CONTACT PIN TERMINAL FEMALE 18GA 5A CRIM
670-001271-005
FUSE 2A SLOW
670-001271-008
FUSE SLOW BLO 4 AMP
670-006418-010
FUSE .25 X 1.25 10AMP
670-006418-020
FUSE TIME DELAY 20A
670-006780-012
FUSE .25 X1.25 2/10A 250VAC
670-006780-018
FUSE .25 X 1.25 1/2A 250 VAC
670-006780-022
FUSE .25 X 1.25 1A 250 VAC
670-006780-028
FUSE .25 X 1.25 2A 250 VAC
670-006780-033
FUSE .25X1.25 5A 250VAC, BUSS MDA5
670-006780-039
FUSE .25X1.25 15A 250VAC
676-000342-004
MOTOR 19,1 VDC
676-000504-003
MOTOR 12VDC
676-001677-001
MOTOR 24V DC
676-090678-003
DRIVE MOTOR, GEARHEAD, 18 VDC, 43:1
678-092469-608
WATLOW 03830282 120 VOLTS 360 WATTS
678-092633-002
HEATER KAPTON 96 OHMS
678-097988-001
PUMP HEATER TURBO PUMP HTR,TMP,1K L/S,PM
680-097811-005
HEATING INSUL,KF-40
681-900990-014
CABLE W, 22AWG, 30KV, SILICON, WHITE 1.30FT.
685-007909-002
FLOPPY DISK DR,3.5",1.44 MB
685-007909-003
FLOPPY DISK 3.5 235HF SN: 988592
685-092263-001
TRANCEIVER XCVR, AUI TO 10BASE-T MODEL: 98098-5 / CODE: 9615S / 12VDC 300MA MAX
685-094680-014
LIGHT PEN PEN,LT,SST,SIDE SW DP98H2599 DT252-507-2A
686-001219-001
KIT TIEWRAP 3-7/8 BLACK AND WHITE INCL 2 CLIPS TY-RAP
686-008917-001
SPIRAL WRAP TEFLON 1/4" 1.3 FT LONG
71-0004-005
FUSE,F/B,3AMP, 250V, CERAMIC BOD
71-0004-006
FUSE, 8 AMP, 250V
710-017033-003
PCB SRAM
713-000038-001
COVER LEXAN LOAD LOCK
713-000130-001
LOCK GATE STOP AIRLOCK
713-004108-001
INSULATOR PLUG ELECTRODE 8"
713-006653-001
RING BACK-UP
713-006654-001
RETAINER WIPER RETAINER
713-008060-001
STANDOFF GAS FEED
713-011517-001
STANDOFF GAS FEED
713-011545-002
GUIDE SPRING KEL-F
713-011560-001
SHROUD RING
713-011579-001
GUIDE PLUNGER
713-011802-001
CLAMP UPPER ELCTRODE CLAMP
713-011803-002
RING, ELECTRODE CLAMP
713-012861-001
TUBING HOSE COILED 4600
713-013043-001
CLAMP RF CABLE
713-013464-497
COVER SAFETY APM BOWL
713-013710-001
COIL VACUUM SHUTTLE ARM 4600
713-014756-001
GUIDE, PIECE GAS LINE
713-017323-002
GUIDE MNTG,GUIDE GAS PLN MB
713-020911-102
PLUNGER, WAFER CLAMP, UPPER
713-021267-001
PIN CLAMP ALIGMENT HEAD
713-028487-001
CONFINEMENT RING VESPEL
713-028553-002
CERAMIC CONFINEMENT CERAMIC SMOOTH VERSION
713-028553-102
RING CONFINEMENT
713-099006-004
COVER E-CHUCK 6”
713-249273-001
ROD,FLAG,SPRT,ESC,9500
713-347202-001
NUT LVL SW HSG
713-347430-001
SPACER SPRT, WDO, DSQ
713-370559-001
PLASTIC BAK WATER OPVANG BAK
713-540236-002
CAP INSUL FSTNR,BOT R CLAMP
714-011083-001
PLATE SKIRT, CHAMBER, SIDE
714-011083-002
PLATE SKIRT, CHAMBER, REAR
714-011167-002
BRACKET MOTOR PROTECTOR MNTG
714-011170-001
BRACKET GAP SENSOR UNIT COMPLETE
714-011222-001
SCREEN VACUUM PORT LL
714-012720-001
BRACKET SUPPORT FRONT COVER PLATE
714-013227-004
PLATE PL,CONN,BLANKOFF
714-015003-001
COVER LOWER MATCH
714-015079-001
COVER, INTERLOCK SWITCH
714-015134-001
GROUND STRIP CONDUCTOR,GROUND
714-015525-002
RF RF UNIT 4420 TOP BOTTOM MATCH
714-015613-001
RF CONDUCTOR GROUND RF MATCH LOWER
714-017254-001
BRACKET, POWER SUPPLY
714-017303-003
PLATE EXTENDER CARD ADIO-II
714-017332-001
BRACKET PANEL SIDE CARD CAGE STEPPER
714-024524-100
PLATE CLAMP CABLE SOLENOIDE VALVE
714-024544-900
GAS STRIP RVS COVER, EXTENSION BOX
714-024547-100
GAS STRIP RVS 9398
714-024549-101
GAS STRIP RVS LINKS
714-024598-100
GAS STRIP RVS
714-029345-001
GAS STRIP RVS
714-029347-002
GAS STRIP RVS RECH
714-055600-001
PLATE SHIM, PEEL ALUM
714-090448-001
MOUNTING
714-090449-001
PLATE MODEM-MOUNTING AUTOETCH
714-092513-004
PLATE
714-100256-002
COVER EMO BOX
714-110861-001
STRAP,TOWER CASE P.C. B/H LEFT
714-110863-001
STRAPTWR CASE P.C B/H &WLMT 8381
714-140242-001
STANDOFF GAS FEED 2/12"
714-190006-001
PLATEWORK, PL71
714-190091-001
COVER PLATF,KYBD,FOLD-DOWN
714-220035-001
LAM PART
714-220066-001
CORNER SUPPORT BRACKET
714-220679-001
PLATE COVER PLATE CMP EXTEND GAS BOX
714-220893-001
GAS STRIP RVS
714-220929-001
SIGNAL INTERFACE BOX, TURBO ISO-VALVE AC POWER, 714-220929-001.
714-222542-001
CLAMP HOUSING
714-347309-001
COVER PLATE
714-347320-001
COVER PLATE WVDS
714-350022-001
COVER SKIRT CHMBR SIDE
714-370752-001
PANEL FRONT RF GENERATOR VERTICAL RACK
714-442041-001
PLATE PL,BLK OFF,INS
714-442042-001
AFZUIGMOND CLASS B 9334 0499
715-000654-001
PISTON END ENTRANCE LIFTER
715-000666-001
PISTON LOWER
715-002531-001
LINKAGE MOD GEAR RACK GATE LINKAGE
715-002570-001
CLAMP FLG LONG REACTOR CHAM/I
715-004154-001
SCREW RETAINING RING
715-005539-001
FRAME PARTS
715-005844-001
RING ORIFICE
715-006310-001
SPACER
715-006311-001
SPACER
715-006362-006
SCREW #8 ANODIZED
715-007100-001
HOLDER WAFER 4” ENT
715-007459-001
COIL INDUCTOR OPT STANDARD
715-007462-001
CLAMP ALU
715-007514-001
SPACER BRAKE
715-007898-001
PAD FOOT
715-008067-001
GATE HARD ANODIZED .139
715-008369-001
LIFTER, WAFER 4-PIN
715-008491-001
RING PLATE RETAINING RING SHIELD
715-008721-001
ELECTRODE ALUM ANOD
715-009161-001
LIFTER WAFER
715-009394-001
ELECTRODE UPPER,690
715-009583-001
LIFTER ENTRANCE / EXIT
715-009827-001
RING EDGE 4"
715-009828-001
CERAMIC RING EDGE 5"
715-010238-001
TOOLS HUB CALIBRATION APM
715-011035-002
PLATE LOWER END (REACTION CHMB
715-011039-001
WINDOW RETAINER UNIVERSAL WINDOW
715-011051-001
FRAME CHAMBER WINDOW
715-011052-002
BRACKET GAS SPRING (OP HAND)
715-011116-002
SLEVE NUT ADJUST
715-011125-001
SPROCKET IDLER
715-011133-002
PLATE MOUNT BRAKE GAP MOTOR
715-011134-001
PLATE MOUNT GAP MOTOR
715-011148-002
CHAIN ARM,CHAIN TENSIONER
715-011171-001
GAP (FLAG)
715-011171-001
BRACKET GAP FLAG SENSOR COMPLETE
715-011204-001
CHAMBER EXIT LOADLOCK HOUSING 180 DEG
715-011219-001
BLOCK FILLER LOADLOCK CHAMBER LEFT
715-011220-001
BLOCK FILLER LOADLOCK CHAMBER RIGHT
715-011518-001
FLANGE CLAMP (LOWER) 715-011518-001 / 715-011519-001
715-011522-001
BRACKET, GASFEED TUBE LWR
715-011522-002
BRKT,GAS FEED TUBE UPPR
715-011531-015
ELECTRODE, ALUMINUM
715-011531-016
ELECTRODE ALUMINIUM ANODIZED
715-011532-006
PLATE, UPPER SEAL, 6" ELECT
715-011535-001
RING CLAMP UPPER ELECTRODE
715-011559-141
CLAMP RING 4" AL ANODISED 30 MICRON
715-011565-003
SCREW BOLT CLAMP RETAINING
715-011626-001
RING COOLING LOWER ELECTRODE
715-011629-008
ELECTRODE LOWER ELECTRODE 8" 4400
715-011639-008
ELECTRODE CAP ELECTRODE LOWER 8 "
715-011673-005
CAP,LWR ELECT.5"DOMED W/VENT
715-011753-001
BAFFLE PLATE UPPER BAFFLE
715-011753-003
BAFFLE PLATE UPPER BAFFLE
715-011825-001
PLATE, LOWER END
715-011900-001
BAFFLE UPR BAFFLE,DOMED E-TRODE/EDG F
715-011901-005
BAFFLE LWR BAFFLE,DOMED 5" ELECTRODE
715-011913-006
BAFFLE PLATE, LOWER BAFFLE, 6"
715-012101-005
WAFERHOLDER HOLDER WAFER 5" ARM REV C
715-012101-006
WAFERHOLDER HOLDER,WAFER,6",ARM EXIT REV A
715-012141-001
SPACER IDLER PULLEY
715-012165-008
HOLDER WAFER 8" TIGHT POCKET
715-012233-002
GATE (HARD ANODIZE), INNER
715-012245-001
GATE PIVOT, GATE
715-012256-002
CLAMP BAR, ROD END
715-012259-001
BEARING FLANG 1.253 OD (MOD) BOSTON FB1620-10
715-012274-001
SHAFT INNER GATE
715-012322-001
GATE PARTS FOR GATE LAM RAINBOW ETCHER ZIE NOTES
715-012370-001
SCREW, SHLDR,SOC,HD,5/16 X 1.00G
715-012556-001
ARM SHUTTLE
715-012566-002
SHUTTLE SPATULA
715-012568-002
ARM,SHUTTLE,.91 OFFSET
715-013038-001
CLIP PANEL
715-013620-001
MANIFOLD PRESSURE SWITCH
715-013705-008
COVER BOWL RINSE 8" APM TCP9600
715-013718-016
CHUCK,SPINNER,6 XYLAN COAT
715-013803-003
PLATE,MOUNTING 8" INTERRUPTER
715-013830-002
ARM EXTENSION, ARM TRANSPORT
715-013832-001
MANIFOLD EXHAUST 5 POSITION
715-013880-002
SPATULA
715-014556-013
GASKET,DRILLED VCR.(0.013)
715-018611-117
ELECTRODE CAP,LWR,ELECTRODE,8",(DMD .050
715-018906-002
ELECTRODE BOTTOM BELLOW
715-018991-206
ELECTRODE ELCTD,ALUM,ANDZ,6"
715-018991-208
ELECTRODE ALUM ANOD 8”
715-021741-006
HOLDER, WAFER, 6
715-024349-100
PLATE, SUPPORT MFC & N2 CONT
715-024599-100
PLATE BLANK OFF MANUAL VALVE
715-025085-001
RING FLTG
715-025737-006
HOLDER COLLAR 6” APM
715-028486-001
PLATE,UPPER SEAL,12 BOLT,6"
715-028552-001
RING CLAMP UPPER ELECTRODE
715-028561-001
SCREW SOC HD CAP 1/4-20 VENTED
715-028615-001
BAFFLE PLATE,UPPER BAFFLE,8"
715-028616-001
BAFFLE PLATE,UPPER BAFFLE 8025
715-028626-104
BAF UPR TPL 4500 6”
715-028754-501
UPPER SEAL PLATE
715-029424-001
BAFFLE MIDDLE
715-030136-003
RING R,EDGE,ESC,6" MAJ FLAT,4420
715-031023-002
SPATULA,EXIT SIDE,9600 SMIF
715-031752-208
CAP LWR ELECT 8" W/GRV .035
715-031769-002
CLAMP, BELLOW LIFTER
715-034789-003
CAP PL,BRKT,DIAL CAP
715-051085-001
PLATE PLTE , DSK, SNSR SPPRT
715-051467-002
PLATE CNTRNG , DRIVE ASSY
715-051968-001
WASHER VCR TEFLON COATED
715-090210-001
PLUG RECIPE GUIDE
715-130078-005
HOLDER HLDR,WFR,5",ISO,TOP CLMP,W/ALI
715-130080-008
HLDR,WFR 8",RDC PKT,W/ALIGN
715-130081-006
HOLDER HLDR,WFR,6",STPR,W/ALIGN HL
715-130092-005
HOLDER HLDR,WFR,6",ARM,EXIT,W/ALIG HL
715-130092-008
HLDR,WFR,8",ARM,EXIT,W/ALIG HL
715-140006-001
SEAL PLATE PLATE, SIDE, RIGHT, OUTER GATE
715-140011-002
GATE BLOCK, PIVOT, OUTER GATE C/A
715-140124-001
BAFFLE, BAF,4528,UPR TPL SET
715-140125-001
BAF,LWR OF THREE 6"
715-140126-001
BAFFLE BAF,4528,MDL TPL SET
715-140286-001
RING R,FOC,6",4420
715-140287-3-B
UPPER CLAMP RING
715-140377-001
RING, ELECTD CLAMP 6" XL
715-249333-001
PLATE MID ESC 9500 ASIQ/384T
715-330224-001
INSR,SHAPED WDO
715-330302-001
SEAL R.GAS FEED
715-330312-001
RING, RETAINING, CLIP.
715-330406-001
CLIP RTNG CLP,GAS FEED
715-330825-007
LINER,CHMBR,AL,EXTND,ALLI,BSR,9600XX
715-330984-001
RING R, BOT GAS INJ FXD GAP ESC
715-331134-001
HOUSING HSG,MDL RCTN CHMBR,FXD GP-SHLD
715-347333-497
BASE PLATE SPRT,SPR,LOWER MICROWAVESTRIPPER
715-470458-900
PLATE PL,SPRT,MFC,FC-980,7440-579
715-495014-001
MANIFOLD LINER,CHMBR,TRNSN MANF,ADPTR
716-001700-001
WINDOW QUARTZ CHAM
716-002968-001
INSULATOR AIRLOCK SMALL
716-005124-001
WINDOW REAR
716-006446-001
DIFFUSER CATHODE
716-006711-001
5.50" DFP-2 UPPER ELECTRODE (USED OEM)
716-006711-001
5.50" DFP-2 UPPER ELECTRODE (NEW 2ND SOURCE)
716-011009-001
QUARTZ WINDOWS QUARTZ BLANK
716-011009-001
WINDOW QUARTZ 1.5 X 7.75 INCH
716-011009-001
QUARTZ WINDOW (NEW)
716-011057-002
CERAMIC RING FILLER UPPER ALUMINA 4420
716-011427-003
CERAMIC DISC 9600 DSQ
716-011533-001
WINDOW, QUARTZ
716-011536-001
CERAMIC RING INSULATOR-UPPER ELECTRODE
716-011536-001
RING INSULATOR UPPER ELECTRODE
716-011540-001
CERAMIC RING FACE-UPPER ELECTRODE
716-011540-001
CERAMIC USED RING FACE-UPPER ELECTRODE
716-011543-001
CERAMIC PLATE, W/C ATTACHMENT("C" = .7)
716-011563-151
CERAMIC 5" DOMED W/C 1.5MM COV W/PINS
716-011563-168
CERAMIC CLAMP PLATE 6”
716-011564-001
ELECTRODE 6.00" DFP-2 UPPER ELECTRODE
716-011623-001
RING CLAMP LOWER ELECTRODE
716-011624-001
CERAMIC RING INSULATOR-LOWER ELECTRODE
716-011624-001
RING INSULATOR-LOWER ELECTRODE
716-011624-005
RING,INSULR,LWR ELCTD,RDCD HGT
716-011638-006
CERAMIC RING, FOCUS, THIN EDGE, 6
716-011758-015
CERAMIC FOCUS ORIFICE COMBO RING 125MM
716-011763-008
CERAMIC RING, EDGE 8 IN. WAFER CLAMP
716-011764-281
PLATE, WAFER CLAMP 8 IN.
716-011830-005
CERAMIC FOCUS RING 5"
716-011830-006
RING FOCUS RING, 6" (ALUMINA) W/C
716-011830-008
CERAMIC FOCUS RING(ALUMINA), WAFER CLA
716-011923-001
CERAMIC PLATE, W/C ATTACHMENT (C = .70
716-013555-003
MANIFOLD INSULATOR CHAMBER MANIFOLD
716-013761-001
GASKET GSKT, SEAL PLT., LIFTER/CYL. 4
716-020904-016
RING EDGE FOCUS LWR WFR CLAM
716-020904-018
CERAMIC NEW RING,EDGE FOCUS,LWR WAFER CLAM
716-020904-018
CERAMIC USED RING,EDGE FOCUS,LWR WAFER CLAM
716-020905-001
CERAMIC USED FOCUS RING LOWER CLAMP
716-021773-002
GASKET BELL JARR 9.25"
716-021856-001
O-RING AS169 CHEMRAZ 190.17 ID X 2,62 7-1/2 ID X 3/32 7.487 ID X.103 ISOTROPIC ETCH
716-021867-001
O-RING AS150 WHITE
716-021883-001
GASKET VITON 4"
716-021894-001
GASKET BELL JAR CLAMP LOWER
716-024590-100
PLATE GASKET CONNECTION SCRUB LINE
716-028028-004
RING ELECTRODE CLAMP 6" 12BOLT
716-028547-001
PLATE WAFER CLAMP INCL 2469449 INNER RING
716-028627-104
BAF,FLT,LWR OF 2,6" SIC
716-031453-002
CERAMIC NEW RING FILLER LOWER CHAMBER
716-031453-002
CERAMIC USED RING,FLR,LWR CHMBR,ESC
716-051222-002
SPACER INSUL, PIN ASSY WAFER LIFTER
716-051293-001
CERAMIC BLOK CERAMIC SIGNAL POWER FEEDTHROUGH
716-051951-001
COVER HOLE DUAL
716-140068-001
CERAMIC RING,FOCUS,ESC,6"
716-140069-001
4-HOLE UPPER CERAMIC INSULATOR RING
716-140141-261
RING,HOT EDGE,15DEG J-J 6"
716-140207-001
TAPE CIRC 3/4 IN KAPTON
716-140236-002
CERAMIC CONFINEMENT RING MODULAR
716-140236-003
CERAMIC CONFINEMENT RING
716-140236-062
RING R,CONFINEMENT,MOD,QTZ
716-140432-061
RING,UPR,KEYED,6INCH
716-140436-001
FOCUS RING
716-160255-002
QUARTZ JAR,BELL,SLEEVE,8.46,ISO ETCH
716-250404-001
RING QUARTZ FOCUS RING 6 "
716-330045-281
RING EDGE NON LANDED 8'' NOTCH
716-330121-001
WDO,RF SHPD CER,FXD GAPN
716-330167-288
RING,CLAMP,BOTTOM ACTUATOR
716-330915-001
CERAMIC RING INSULATOR ESC
716-331051-002
R,UNIFTY,CUT-OUT,AS-FIRED
716-331118-164
RING FOCUS QUARTZ, 6" ESC SEMI
716-460216-001
RING FOCUS RING 8'' STP CHAMBER
718-092326-081
ESC ELCTD, CAP, 8" ESC, NOTCHED
718-094523-281
ELECTRODE ASSY ELCTD, ESC 8'' NOTCHED
718-094756-061
ESC ELCTD,UPR,6" ESC,MJR FLAT
718-094756-061
ESC ELCTD,UPR,6" ESC,MJR FLAT BAD CONDITION ONLY FOR TESTING PURPOSES
718-240531-001
CONNECTOR SOCKET RF MODIFIED
720-000930-004
SCR, SCH CAP, 6-32 X 1/4 " LG SST
720-000930-018
SCR,SCH CAP,6-32X1"LG,SST
720-000930-020
SCR,SCH CAP,6-32X1-1/4"LG,SST
720-000940-006
SCREW SCH CAP 8-32
720-000942-007
SCREW, FL,HD,SOC, 8-32X7/16 LG
720-000950-001
SCREW FOR CLAMP FLANGE LONG
720-000950-006
SCR,SCH CAP,10-32 X 3/8 LG
720-000960-008
SCR, SCH CAP, 1/4-20X1/2
720-001002-006
SCR,PNH,PH,8-32 X 3/8
720-006524-006
SCREW FLATHEAD 6-39 X .375
720-007317-020
SCR, INNER DOOR ASSY SCH CAP, 3/8-16
720-009063-012
SCREW FOR CHAMBER AND ELL AND XLL BOTTOM
720-009531-004
SCREW FLAT HD 6-32 UN X 1/4 KEL-F
720-060632-008
SCR.SCH CAP , 316,1/4-28X1/2
720-090460-028
SCREW PROCESS COVER,SCREW #8-32.AA
720-090943-010
SCR FLATHEAD 10-32 KEL-F
720-092758-010
SCREW,FL HD,SLTD,VNTD,4-40X5/8
720-094702-003
SCREW SOCKET HEAD 8-32 X 3/4
720-095483-024
SCR,FLH,SLTD,NYL,1/4-20X1-1/4
720-443208-010
SCR,SLTD,FH-6-32UNC,MLD,PEEK
721-000936-001
WASHER FLAT RING 6M
721-000936-002
WASHER, LK, #6
721-000946-001
WASHER, FLAT *8
722-000938-001
NUT HEX 6-32
723-001260-001
SPACER RND .375 X .010 X .562
723-060784-004
STANDOFF 1/4 HEX 6-32 M-F
726-001046-001
RING CRST .250 SHAFT SST
726-007499-003
CLAMP SPLIT HUB .313 SHAFT
726-009029-001
SCREW SET FOR HARMONIC DRIVE
726-093702-001
CLIP, HOLD ON, VERT HDL
729-061056-005
WASHERS FLAT SS M5X1.0THK 316/304 USED NOT CLEAN
734-000228-001
O-RING BS359
734-000337-001
O-RING BS127 1-7/16 ID X 3/32 VITON
734-000420-001
O-RING VITON 1.131 ID X .060 SPECIAL 28,7 X 1,52 MM
734-000663-001
O-RING BS224 1.734 ID X .139 (BLACK) 44,04 ID X 3,53
734-000690-001
O-RING BS225 1,859 ID X .139 CS 47,22 X 3,53 (VITON) BLACK
734-000799-001
O-RING BS236 82,14 X 3,53
734-000982-001
O-RING BS031 1.739 ID X .070 BUN
734-001019-001
O-RING BS213 (VITON) BLACK .921 ID X .139
734-001047-001
O-RING BS379 11 ID X 3/16
734-001048-001
O-RING BS364 6-3/4 ID X 3/16 VITON
734-001081-001
O-RING BS254 5.484 ID X .139 CS
734-001082-001
O-RING BS441 BLACK 7" ID X 1/4 6.975 ID X .275 177,17 ID X 6,99
734-001422-001
O-RING BS115 WHITE .737 ID X .103 CS 18,72 ID X 2,62
734-001682-001
O-RING BS127 POLYURETHANE 1.424 ID X .103
734-001710-001
O-RING BS230 2.484 ID X .139 C/S
734-002013-001
O-RING BS257 VITON BLACK 5.859 ID X .139
734-002014-001
O-RING BS252 5-1/4 ID X 1/8 VITON
734-002215-001
O-RING BS152 BLACK VITON 3-1/4 ID X 3/32 3.237 ID X .103
734-004132-001
O-RING 10.250 ID X .103 CS SPECIAL 260,35 X 2,62 MM
734-004194-001
O-RING BS014 1/2" ID X 1/16
734-005186-001
O-RING BS242 3.984 ID X .139 CS (BLACK) 101,19 ID X 3,53
734-005271-001
O-RING BS111 .424 ID X .103 (BLACK)
734-005632-001
O-RING BS225 1.859 ID X .139
734-005633-001
O-RING BS134 BLACK 1 7/8 X 3/32
734-005634-001
O-RING BS231 2.609 X .139
734-005635-001
O-RING BS252 5.234 X .139
734-005636-001
O-RING BS162 5 3/4 X 3/32
734-006000-001
O-RING BS116 BLACK .737 ID X .103 CS 3/4 ID X 3/32 18,72 ID X 2.62
734-006041-001
O-RING BS171 VITON 7.987 ID X .103 C/S
734-006042-001
O-RING 8.58 ID X .103 C/S SPECIAL 217,93 X 2,62 MM
734-006304-001
O-RING BS010 1/4 ID X 1/16 C/S
734-006337-001
SEAL QUADRING 5/8 ID 3/32CS V
734-006655-001
O-RING BS114 5/8 ID X 3/32 W
734-006760-001
O-RING BS264 7-1/2 ID X 1/8 C/S
734-006761-001
O-RING BS158 BLACK
734-006762-001
O-RING BS150 BLACK 2 7/8 ID X 3/32 C/S
734-006763-001
O-RING BS109 BLACK 5/16 ID X 3/32 C/S
734-006767-001
O-RING BS162 5-3/4 ID X 3/32 C/S
734-006776-001
O-RING BS007 5/32 ID X 1/16 C/S
734-006779-001
O-RING BS114 5/8 ID X 3/32 C/S
734-007260-001
O-RING BS011 .301 ID X 070 C/S
734-007314-001
O-RING BS212 BLACK .875, C/S .139 7/8 ID X 1/8 21.82 ID X 3.53
734-007333-001
O-RING BS133 VITON BLACK 1.799 ID X .103 45,69 ID X 2,62
734-007334-001
O-RING BS151 VITON BLACK 2.987 ID X .103
734-007335-001
O-RING BS017 .739 ID X .070 (BLACK) 17,17 ID X 1,78
734-007359-001
O-RING BS280 BLACK 13.984 ID X .139 C/S 14 ID X 1/8 355,19 ID X 3,53
734-007369-001
QUAD RING .614 ID X ,070 CS 5/8 I.D.X 1/16 C/S
734-007412-001
O-RING BS284 BLACK 17.955 ID X .139 C/S 18 ID X 1/8 456,06 ID X 3,53
734-007460-001
O-RING BS167 BLACK VITON 6.987 ID X .103 177,47 ID X 2,62
734-007743-001
O-RING BS035 BLACK 2.239 ID X .070 56,87 ID X 1,78 2 1/4 ID X 1/16
734-007744-001
O-RING BS283 BLACK VITON 17" X1/8 C/S 430.66 ID X 3.53 C/S
734-008123-001
O-RING BS278 VITON 11.984 ID X.139
734-008179-001
QUAD RING 15/16 ID X 3/32 CS .924 ID X .103 CS
734-008546-001
O-RING BS169 BLACK VITON 7.487 ID X .103 CS
734-008722-001
O-RING BS273 9-3/4 ID X 1/8 C/S, VITON
734-008819-001
O-RING BS125 BLACK SHROUD ENDPOINT WINDOW 1 5/16 ID X 3/32 C/S 1.299 ID X .103 32,99 ID X 2,62
734-008822-001
O-RING BS241 BLACK 3.859 ID X .139 VITON 98,02 X 3,53
734-008856-001
O-RING 5 5/8" X 1/16 CS VITON SPECIAL UPPER ELECTRODE 5.600 ID X .070
734-008862-001
O-RING BS231 VITON BLACK 2.609 ID X .139 C/S 2-5/8 ID X 1/8 66,27 X 3,53
734-008862-003
O-RING BS231 BLUE FL 2 5/8 ID X 1/3
734-008863-001
O-RING BS260 BLACK VITON 6.484 ID X .139 C/S 6-1/2 ID X 1/8 164,69 ID X 3,53
734-008971-001
O-RING BS255 (BLACK) 5.609 ID X .139
734-009013-001
O-RING BS018 .739 ID X .070 VITON BLACK 18,77 ID X 1,78
734-009020-001
O-RING BS267 BLACK 8.234 ID X .139 C/S 209,14 X 3,53
734-009250-001
O-RING BS159 BLACK VITON 4.987 ID X .103 5" ID X 3/32 126,67 ID X 2,62
734-009767-001
O-RING BS010 EPR BROWN .208 ID X .070
734-009868-001
O-RING BS232 BLACK 69.44 X 3.53 OR 2 3/4ID X 1/8 VITON
734-009869-001
O-RING BS222 1.484 ID X .139 CS 37,69 ID X 3,53
734-009908-001
O-RING BS238 BLACK VITON 3.484 ID X .139 CS
734-009992-001
O-RING BS120 BLACK VITON .987 ID X .103 25.07 ID X 2,62 1" ID X 3/32
734-061280-109
O-RING BS109 BROWN .299 X .103 5/16 X 3/32
734-061280-116
O-RING BS116 VITON .737 ID X .103 3/4 ID X 3/32 18.72 ID X 2.62
734-061280-130
O-RING BS130 VITON BLACK 1.612 ID X .103
734-061280-173
O-RING BS173 VITON BROWN 8.487 ID X .103 8 1/2 ID X 3/32 215.57 ID X 2.62
734-061280-210
O-RING BS210 BROWN VITON .734 ID X .139 CS 18,64 ID X 3,53
734-061978-364
O-RING BS364 (WHITE) CHEMRAZ 6.725 ID X .210 6 3/4 ID X 3/16 170,82 ID X 5,33
734-090074-001
O-RING BS470 VITON 20.955 ID X .275 C/S
734-090633-001
O-RING BS323 BLACK 32,69 ID X 5,33 1-5/16 ID X 3/16 1.287 ID X .210
734-090690-001
O-RING BS385 VITON BLACK 405,26 X 5,33
734-091993-001
O-RING BS268 8 1/2 ID X 1/8 C/S SILICON 8,484 X 0,139 CS 215,49 ID X 3,53
734-091994-001
O-RING BS283 BLUE 17 ID X 1/8 CS SILICON 16.955 ID X .139 430.66 ID X 3.53 C/S
734-092038-001
O-RING BS275 (SILICON) BLUE 10.484 ID X .139 10 1/2 ID X 1/8 253,59 ID X 3,53
734-092039-001
O-RING BS116 BLUE 3/4 ID X 3/32 .737 ID X .103 CS 18,72 ID X 2,62
734-092040-001
O-RING BS173 8.487 ID X .103 (FLUORSILICON) BLUE
734-092041-001
O-RING BS380 11.475 ID X .210 (FLUORSILICON) BLUE 11 1/2 I9D X 3/16 C/S
734-092107-001
O-RING BS372 GATE SEAL, 200MM
734-092325-001
O-RING BS268 8 1/2 ID X 1/8 CS KALREZ
734-092358-001
O-RING BS217 1.109 ID X .139 CS BLUE 1 3/16 ID X 1/8 FLUORSILICON
734-092559-013
O-RING BS013 FLUORSILICON .426 ID X .070
734-092560-154
O-RING BS154 BLUE 3.737 ID X .103
734-092561-231
O-RING BS231 BLUE 66,27 X 3,53 2,609 ID X ,139
734-092561-238
O-RING BS238 BLUE 88,49 X 3,53 3,484 ID X ,139
734-092561-241
O-RING BS241 BLUE
734-092561-268
O-RING BS268 (BLUE) 8.484 ID X .139 C/S
734-092561-270
O-RING BS269 BLUE 221,84 X 3,53 8,984 ID X ,139
734-092561-282
O-RING BS282 BLUE 15.955 X .139
734-094637-001
O-RING BS160 5.237 ID X .103 (SILICON) BLUE 133,02 ID X 2,62
734-095085-017
O-RING BS017 EPDM .676ID X .070
734-095085-120
O-RING BS120 .987 ID X .103 ETHYLEEN-PROPYLEEN BLACK
734-095085-211
O-RING BS211 .796 ID X .139 (VITON) BLACK 20,22 ID X 3,53
734-09516-001
O-RING BS112 VITON (BLACK) .487 ID X .103 C/S 12.37 ID X 2.62
734-095412-001
O-RING FLG8 SHP 167 X 2,62MM BLUE SILICON DSQ INNER DOOR
739-000421-001
SEAL TFL .75 ID X 1.00 OD DBL
739-000422-001
SEAL TFL .25 ID X .125 X .50
739-000983-001
SEAL TFL .875 ID .125 X 1-.12
739-000984-001
SEAL TFL 1-.125 X 1.25
739-000985-001
SEAL TFL 1.5 X .12 X 1.75
739-009418-001
SEAL LID ROTARY
739-090290-001
SEAL DELTA, 5.031 ID X .13 CS
742-000438-001
GASKET, FIBER
742-007760-001
GASKET RF (WIRE OVER ELAST)
742-008268-001
GASKET PCTFE FILTER GASKET KIT FOR 2TF AND 4TF SERIES TEE-TYPE PARTICULATE FILTERS
742-060786-007
GASKET GSKT CONFLAT 10” ELE NKL PL
742-091957-001
GASKET,ISO,G 1/8 BOX 18
742-093181-002
GASKET GSKT,RF,BECU O-RING
742-093215-002
GASKET GSKT,EMI,SPIRAL,W/CORD
746-001125-001
BEARING THRUST 1/4 ID
746-007147-001
BEARING CAM FOLLOWER CFH 5/8 B 281154
746-007608-001
WASHER THRUST .25” X .060
746-007700-001
BEARING RADIAL BALL.375 BORE
746-009143-001
BEARING BRONZE SLEEVE 1/4 LG
746-090634-001
BEARING, LINEAR .50 OD X .25 I
749-001138-001
SHAFT FLEX SHAFT 8” LONG
749-001623-001
SHAFT FLEX 3” LONG
749-007984-001
COUPLING HELICAL FLEXIBLE SHAFT COUPLING (ALUMINIUM DSAC200-24-16
750-001127-001
CHAIN LINK OFFSETT #25 ROLLER CHAIN
750-002176-001
CHAIN KIT MASTER-LINK #25
750-007782-001
CHAIN ROLLER CHAIN 15.75" LONG (#35
750-090192-001
CHAIN LINK MASTER #35 SST
754-007751-001
SPRING TENSIONER 1/4 OD X 3/4
754-007791-001
SPRING GAS CHAMBER
754-090359-015
SPRING COMPRESSION SPRING, SST
754-092082-002
BEARING, GUIDE, W/SPRING, LEAF. 873, ASSY,GDE BRG AND SPR
765-007656-001
SPROCKET 1/4
765-007787-001
SPROCKET DRIVEN 2.873PD .500B
765-008016-004
HUB MOUNTING
765-008372-001
ENCODER SHAFT, L25G-F3-1000-ABZC-7830-LED-ED15-S
766-000215-002
VALVE 3-WAY MANIFOLD
766-000433-002
VALVE ETO-3 24VDC
766-000439-001
VALVE NEEDLE 3-DEGR
766-002089-002
VALVE 4 WAY 24V
766-009447-001
VALVE SOLENOID DOUBLE 4-WAY
766-009543-001
VALVE SPC 1/2 NPT
766-009866-040
BELLOW NW-40 ASSY KIT
766-009866-080
BELLOW NW80 ASSY KIT
766-090814-001
ACTUATOR RPLMNT,VERIFLO VLV,NC
766-090815-001
ACTUTOR,RPLMNT,VERIFLO VLV,NO
766-092016-002
FILTER SILENCER
768-000748-001
SWITCH PRESS 80 PSI SET
768-001063-003
SWITCH VACUUM 709 TORR
768-091910-001
SWITCH,VACUUM, 5 TORR GAUGE
770-007494-001
CYLINDER ARM DR 3/4
770-093262-001
CYLINDER LIFTER MICROWAVE STRIPPER ASFHD118X58 - HTV TBE 3/04
771-001207-001
GAUGE THERMOCOUPLE
772-090393-050
FLOW RESTRICTOR, 50 SCCM .SST 30PSI
775-007643-001
FILTER ELEMENT 40-MICRON
775-008831-001
FILTER MILLIPORE WITH O-RING SEAL
775-010933-001
FILTER WAFERGARD II F-MICRO WG2FT1RR2
785-221249-001
LABEL PLASTIC LABEL (AR)
785-221249-002
LABEL PLASTIC LABEL (CF4)
785-221249-003
LABEL PLASTIC LABEL (CHF3)
785-221249-004
LABEL PLASTIC LABEL (HE)
785-221249-005
LABEL PLASTIC LABEL (O2)
785-221249-006
LABEL PLASTIC LABEL (SF6)
785-221249-007
LABEL PLASTIC LABEL (N2)
785-221249-008
LABEL PLASTIC LABEL (NF3)
785-221249-009
LABEL PLASTIC LABEL (BCL3)
785-221249-010
LABEL PLASTIC LABEL (CL2)
785-221249-011
LABEL PLASTIC LABEL (SICL4)
785-221249-012
LABEL PLASTIC LABEL (HBR)
785-221249-013
LABEL PLASTIC LABEL (C2F6)
785-221249-015
LABEL PLASTIC LABEL (CDA)
785-221249-016
LABEL PLASTIC LABEL (C3F8)
785-221249-017
LABEL PLASTIC LABEL (HCI)
785-221249-018
LABEL PLASTIC LABEL (C4F8)
785-221249-019
LABEL PLASTIC LABEL (HE/O2)
785-221249-020
LABEL PLASTIC LABEL (CO)
785-221249-021
LABEL PLASTIC LABEL (CH2F2)
786-240714-001
STICKER CAUTION ULTRAVIOLET RADIATION HAZARD
786-240728-120
STICKER HAZARDOUS VOLTAGE 120 VOLTS
786-240729-001
STICKER HOT SURFACE INSIDE
790-007854-001
PAD FOOT LEVELING
790-008882-205
TIMING BELT BELT POSITIVE DRIVE .080P 205
790-050501-782
CABLE WIRE CABLE, ROBOT UPPER ARM INTERCONNECT SPLICE TO BOARD
790-092080-002
BALL ETCHER, LAM, ALLIANCE/TCP9400, LOCKING BALL
790-092081-001
BEARING CRANKBOLT BEARING
790-130044-195
BELT TIMING .080P, 3/8W, 195T
790-130044-205
BELT,TIMING,.080P,3/8W,205T
792-200009-195
SCREW BOX 3-30
792-200015-431
OPTO DETECT BOARD REV H
792-200017-109
HOSE 3015458 2.916Ø BOX 2
792-200017-819
FERRULE NYLON 1/2 " BOX 3-13
792-200018-698
TUBE 2EA FMP4SUP TUBE KOPELSTUK
792-200018-701
CONNECTING PIECE 18.10/18.10 BOX 2
792-200018-978
SWITCH CKD PRESSURE SWITCH APE-8T-3N
792-200019-202
VALVE AV 23011 SU
792-200019-676
RESISTOR DALE ROX-5T 20M FK 9743
792-250900-017
RINGS 12.59 OUTSIDE 3.89 INSIDE 1.69 D BOX 3-30
792-515000-095
WINDOW VIEWPORT EMISSIONPORT Ø38MM 409F
793-090441-009
PCB VIDEO INTERFACE PCB (TOP ONLY) TOP & BOTTOM)
795-006374-001
FILTER OPTICAL 520 NM
795-092093-003
SENSOR PHMISR, BLTIN AMP, SENSOR. 6
796-000233-005
SEAL CTRING ASSY NW16,S/V
796-001233-001
CLAMP WING NUT & SCREW CLOSER NW25
796-001936-001
FILTER 2 MICRON ELEMENT KIT FOR 4F, 2TF AND 4TF SERIES PARTICULATE FILTERS
796-002232-001
FLANGE NW25 TYPE 304
796-002672-001
GASKET KIT LEVEL I SPARES
796-002673-001
STEM INSERT/ADAPTER KIT
796-002673-002
INSERT PCTFE STEM TIP/ADAPTER KIT FOR 6BK AND 8BK SERIES BELLOWS-SEALED VALVES WITH 1 SERIES ACTUATORS
796-006238-001
AC2 CONTROLLER NW40 THROTTLE
796-006238-002
AC-2S06 CONTROLLER NW40 THROTTLE
796-006238-011
CONT,THROT V,AC-2
796-006708-001
FILTER IN-LINE 1/4 VCR MILLIPORE
796-008333-001
VACUUM LINE ELBOW RADIUS 90 GRADEN NW10
796-008792-012
SCREW, FL HD, SLTD, VNT, 6-32X5/8 AL
796-009209-006
SCREW SOC HD VENT 1/4-20 X 3/ - ELL + XLL TO CHAMBER SHORT VENTED
796-009209-012
SCREW ELL + XLL TO CHAMBER LONG VENTED
796-009240-016
SCREW INNER DOOR
796-090059-001
VCR MALE TO VCO MALE ADAPTER SS-4-UT-1-OR
796-090768-001
NUPRO VALVE, 1/2 BTT WLD, NRMLY CLSD
796-091775-001
FILTER IN-LINE GAS FILTER WAFERGUARD 2
796-093571-001
CONN, MALE 1/4" VCR W/O'RING
797-090865-307
MASS FLOW CONTROLLER TYLAN FC-2900V 50 SCCM CF4
797-090867-310
MASS FLOW CONTROLLER BROOKS 5850E, 50 SCCM, CHF3
797-092814-403
MASS FLOW CONTROLLER TYLAN FC-2900MEP5 50 SCCM O2
797-092814-502
MASS FLOW CONTROLLER TYLAN FC-2900MEP5 500 SCCM HE
797-094698-303
MASS FLOW CONTROLLER UNIT UFC-1660 10 SCCM O2
797-094698-307
MASS FLOW CONTROLLER UNIT UFC-1661 50 SCCM CF4
799-100332-001
LAM RAINBOW INDEXER ASSYST SMIF INDEXER 6" 150MM (TESTED)
799-110333-004
INDEXER ASYST SMIF INDEXER 8" 200MM LAM RAINBOW RECEIVE INDEXER (USED)
810-000503-003
PCB MATCH
810-001984-002
PCB MATROX
810-002889-005
PCB ARM 4.0 CONTROL PCR 810-2889-005
810-00392-001
PCB SERIAL I/O REV.D
810-004092-001
PCB ASSY RF INTERFACE
810-007930-001
PCB COMBINATION
810-008566-001
PCB MOTOR DRIVER
810-015932-002
PCB ASSY,PCB,DIP,AUTOTUNE,LOW FREQ
810-017001-001
PCB ASSY,PCB-I/O MTHBD,ESC-OK
810-017001-010
PCB ASSY, PCB-I/O MTHBD,ESC-OK
810-017002-001
PCB I/O BREAKOUT BD
810-017003-004
PCB ASSY, PCB DIP HIGH FREQUENCY
810-017005-001
PCB LAM SOLENOID INTERLOCK BD 6381287
810-017006-001
PCB ASSY PCB TEMP SENSOR
810-017008-001
PCB TEMPERATURE ASSEMBLY
810-017010-001
PCB STEPPER MOTOR MOTHER BOARD
810-017012-002
ASSY, PCB, HEARTBEAT
810-017016-001
PCB STEPPER MOTOR DRIVER BOARD
810-017027-003
PCB ASSY - PCB RF INTERLOCK
810-017030-005
PCB ASSY PCB GAS PANEL
810-017031-002
ASSY , PCB, ADIO-AO
810-017031-003
PCB ASSY, PCB, ADIO-AO
810-017031-004
PCB ASSY, PCB, ADIO-AO
810-017033-003
PCB SRAM 512K
810-017034-003
PCB ASSY,PCB,VME,68030, FOR CLASSIC TOOL.
810-017034-004
ASSY, PCB, VME 68030
810-017034-013
PCB ASSY,PCB,VME,68030, CPU FOR CLASSIC TOOL.
810-017034R300
PCB RFRB ASSY,PCB-CPU6,68010
810-017035-001
PCB ASSY PCB SASI (MOD) FOR CLASSIC TOOL
810-017035R001
PCB ASSY PCB SASI (MOD)
810-017038-002
PCB SERIAL I/O-2
810-017083-001
PCB RF FILTER
810-017086-006
POWER SUPPLY ASSY PCB ESC
810-017086-670
PCB ASSY,PCB,ESC PWR SPLY CONFIG
810-017092-001
PCB GASBOX INTERLOCK BOARD
810-017093-001
PCB ASSY,PCB,GAP MOTOR CONTROLLER
810-034821-006
PCB ASSY PCB 9XXX PM CPU & ETHERNET LAM MOTHER BOARD
810-190108-001
PCB WVDS DISPLAY SOS DESIGN - BASE PRINT, NO COMPONENTS
810-370540-004
PCB ASSY, PCB CONNECTOR BREAKOUT
810-490908-001
PCB ASSY, PCB, SERVO DR
810-492740-001
PCB LOADLOCK PUMP INTERFACE
810-550033-001
PCB ASSY SINGLE CCD CARR
825-010499-414
HARD DISK ASSY,HD DR,IDE W/CONTRLR PCB
839-007158-001
GASLINE WLDMNT,GS FD LN,FLX 1/4VCR-1/4
839-007173-001
GASLINE WLDMNT,GAS FEED LINE,FLEX
839-011025-001
WELDMENT NUPRO MANOMETER, HEATED.
839-011516-001
GASLINE WELDMENT GAS LEED LINE UPPER CHAMBER
839-011884-001
GASLINE WELDMENT,GAS FEED LINE,8" 4520
839-011907-100
ELCTD,SILICON,8",HI TEMP
839-012255-001
BELLOW, INNER GATE
839-013512-001
WELDMENT MANIFOLD CHAMBER VAC
839-013521-001
VALVE ISO 11/2 MODIFICATION
839-013901-001
VALVE WLDMNT MOD VALVE THROTTLE
839-014757-067
GASLINE WELDMENT, GAS FEED LINE, FLEX
839-014757-084
WLDMT, GAS FEEDLINE, FLEX, 84"
839-021736-001
MANIFOLD WELDMENT, MANOMETER ISO
839-024354-100
WELDMT, LOADLOCK VENT
839-024372-100
VALVE WLDMT,MNL VLV,GAS SHTF
839-024445-100
WELDMENT HELIUM VACUUM LOWER MATCH H/C
839-029227-100
ADAPTOR WELDMENT HELIUM LINEW /MANO ADAPTOR
839-031766-003
BELLOW, LIFTER
839-140205-001
WELDMENT PARTS WLDMT, LL, VAC SW, CVTRN TB
839-219160-006
PADDLE EXIT LOAD LOCK HEATED PADDLE 6" LAM 9600
839-240559-001
TOOLS ASSY TOOL ALIGNEMENT 4 PIN LIFTER
839-360005-002
WELDMENT TCP 96.0 HE COOLING
839-440535-001
WELDMENT LOADLOCK ELL+VAC SWITCH +CONVECTRON TUBE
840-009865-040
KIT HPS VALVE REPAIR
840-009865-080
KIT HPS VALVE REPAIR NW-80
840-009865-100
KIT, HPS VALVE REPAIR NW-100
846-222261-001
KIT INDXR/POD PRES STATUS
849-020338-001
KIT PM ANNUAL LOADSTATION
849-020339-001
KIT ANNUAL, P.M. ENT L.L.
849-020340-001
KIT ANNUAL, P.M. EXT L.L.
849-020355-002
KIT QRTLY, P.M. EXT L.L.
849-020355-002
KIT QRTLY, P.M. EXT L.L.
849-020361-002
KIT,ANNUAL,PM,APM
849-210021-001
KIT,PM,ANL,CHMBR,4520,CLP SYS
849-210028-001
KIT,QTRLY,PM,CHMBR 4520,CLP SYS
849-432139-013
KIT, MAINT, ANNUAL, VCE4, LIP, AUTO
849-432142-001
KIT, MAINT, QTR, ROBOT, KALREZ
849-432144-001
KIT MAINT QTR XPRT CHMBR A6
849-443253-001
PM-KIT EO45 QPM COMPLETE
849-510280-001
KIT QUARTERLY MWAVE STPR A6
85-000-05010
SCREW, SHHD, SST, 6-32X5/8
85-010-05006
SCREW, BHHD, SST, 6-32X3/8
852-017500-001
MONITOR ASSY CHAS MONITOR 14" GF
853-000577-001
ASSY PHASE & MAG
853-001052-001
SENSOR ASSY GAP SENSOR
853-001154-008
ARM ASSY EXIT ARM -6
853-001198-001
GATE ASSY GATE & LINKAGE-OUTER DOOR
853-001198-002
GATE ASSY GATE & LINKAGE-INNER DOOR
853-001372-001
ASSY TEMP SENSOR
853-002165-001
VALVE ASSY ISO DRIVE VALVE ENTRAN
853-004063-003
STOP ASSY STOP POST - 6"
853-004156-001
CABLE ASSY I-O HARNESS INTERFACE CABLE
853-005683-001
MODULE MASTER MODULE SYSTEM OPERATION KIT VERVANGEN DOOR P/N 853-005684-001
853-005684-001
RECEPT CARTRIDGE PE0601 PAP120, ASSY RECIPE MODULE
853-006612-001
MOTOR ASSY DRIVE EXIT MOTOR
853-006613-001
ASSY EXIT POINT ASSY
853-006697-002
VALVE ASSY
853-007526-001
GATE ASSEMBLY ASSY GATE DR CYLINDER HUMPHREY CN534B
853-007531-001
SWITCH ASSY BRACKET REED SW HUMPHERY
853-009520-001
LIFTER ASSY LIFTER MECHANISM
853-011053-001
ASSY MANIFOLD CHAMBER MANOMETER
853-011094-102
ENDPOINT DETECTOR VERITY ENDPOINT DETECTOR EP200MMD, LAM 853-011094-102 3618 MONOCHROMATOR
853-011117-001
ASSY GAP HEATING
853-011141-003
ASSY BRAKE RF GAP
853-011142-001
ASSY MOTOR RF GAP
853-011451-001
SOLENOID ASSY FAN, STRIPPER PAPST 614
853-011632-002
ASSY LOWER ELECTRODE OXIDE INCL ELECTRODE EN 4 PIN LIFTER
853-011661-503
LIFTER ASSY LIFTER CYLINDER
853-011832-001
ASSY HARN. THERMOSTAT GAP HSG
853-011833-001
BOX, RF, SWITCH, ASSY,HARNO/TEMP
853-012095-006
WAFERHOLDER ASSY WAFER HOLDER TIGHT POCKET 6"
853-012100-003
LOADLOCK ARM HOUSING ASSY
853-012123-001
HARMONIC ARM DRIVE ASSEMBLY
853-012371-002
CABLE ASSY,SW,ATM PR,MVCR,ADJUSTABLE
853-012600-002
INDEXER ASSEMBLY, RECEIVE
853-012850-001
WAFER SHUTTLE ASSEMBLY FOR LAM TCP 9600
853-013542-002
VALVE ASSY ISOLATION VALVE, HTD
853-013544-001
VACUUM LINE WELDMENT SPOOL SECTION LOAD LOCK ISO VALVE
853-014678-001
SOLENOID ASSY SOLEN GEN WATER VALVE
853-015060-001
SENSOR ASSY TEMPERATURE SENSOR
853-015130-002
ASSY RF MATCH GEAR DRIVEN
853-015130-003
ASSY,RF,RVM MATCH (TESTED)
853-015760-002
SENSOR ASSY,APM OPTICAL SENSOR,9600
853-015762-001
ASSY SWITCH VACUUM
853-015982-001
ASSY MANUAL CONTROL BOX AUTOTUNE
853-017162-002
EMO ASSY REAR EMO ASSEMBLY
853-017163-101
RF BOX ASSY, RF SWITCH BOX 100659
853-017264-001
CABLE RS232 GAP INTERFAC
853-017335-101
FAN DC FAN TRAY CONTROL ENCLOSURE ASSEMBLY
853-017340-002
RF UNIT RFRB ASSY RESISTOR BANK
853-017344-001
CABLE ASSY, HARNESS DISK CONTROLLER
853-017353-001
CABLE CRT RS 232 INTERFACE
853-017354-001
CABLE INTERFACE ADIO 1B2P30
853-017354-002
CABLE ASSY, CA, RIBBON, SIO 1B18P40
853-017411-004
CABLE SSY,HARN,RF BOX GAP CNTRL
853-017435-001
ASSY BOX LIFTER FILTER/SENS
853-017478-001
ASSY PRESSURE SWITCH 10 PSIG
853-017480-001
SWITCH ASSY VACUUM SWITCH 75 TORR CL DECR MAX PSIG 30HG 1A 115VAC
853-017505-001
POWER SUPPLY, POWER ONE, HTAA-16W-A, INPUT: 100-240VAC OUTPUT:+5VDC-2A, +/-12VDC-0.4A, -5VDC-0.4A.
853-017515-001
CABLE ASSY CABLE FLOPPY DC POWER INTERFACE
853-017620-001
COVER BOX TRI-CONVECTRON INTERFACE
853-017633-006
ASSY , OPT SNSR, DRLGTN, 7.00
853-017633-007
SENSOR ASSY, OPT SNSR, DRLGTN, 7.75
853-017633-010
CABLE ASSY, OPT SNSR, DRLGTN, 21.75
853-017643-101
SOLENOID ASSY, SOLENOID, RELEASE
853-017645-101
FAN ASSY,FAN,LWR MATCH BOX, 24VAC, 8X8
853-017805-035
CABLE ASSY CABLE RF GENERATOR
853-017807-001
RF CABLE ASSY CABLE INTERCONN COAX LOW
853-017816-030
CABLE ASSY, POWER CORD,ETCHER, 30FT
853-017818-040
CABLE ASSY ,CA, EMO AC CONT BOX, 40'
853-017835-040
CABLE ASSY,CA,EMO AC CONT BOX,40'
853-017908-005
CABLE ASSY,CA,RBN,RF GEN 2/RF GEN 4
853-017936-001
CABLE ASSY CABLE RF MATCH D-SUB UPP
853-017953-040
CABLE ASSY,CA,PMP CART INTERFACE,40'
853-017960-002
CABLE ASSEMBLY, CA, RS-232 CONTROLLER INTERFACE
853-017961-020
CABLE DET OPPER INTERCONN
853-017988-040
CABLE ASSY,HARN,TCU INTERFACE
853-020936-003
ASSY,UPR SEAL PL,POLY
853-021637-045
CABLE
853-021819-002
REDUCED HEIGHT ARM ASSY
853-021917-004
ASSY,HTR PADDLE/FDTHRU,ISO,4"
853-021917-005
ASSY,HTR PADDLE/FDTHRU,ISO,5"
853-021917-006
ASSY,HTR PADDLE/FDTHRU,ISO,6"
853-023538-001
HEATSINK VACUUM LINE
853-024475-001
CABLE ASSY,CA,GAS PANEL PCB INTRFC
853-025054-126
ASSY,PCB,ESC PWR SPLY
853-025054-126
POWER SUPPLY ASSY,HSG,ESC POWER SUPPLY DC BIAS. INCL.: 810-017086-106
853-025054-201
POWER SUPPLY ASSY,HSG,ESC PWR SPLY,MONO,INCL: 853-025054-201
853-025072-007
CABLE ASSY,HARN,DC BREAKOUT,ESC
853-027430-002
SWITCH ASSY,LIMIT SWITCH,LIFTER,UP
853-029462-002
SENSOR ASSY, WAFER SENSOR, EXIT LL
853-031457-001
BARATRON ASSY,MNMTR,0-100MTORR
853-031457-002
BARATRON 0-10 TORR
853-031556-019
ASSY, HEATER CARTRIDGE, 75WATT
853-031556-022
ASSY, HTR CARTRIDGE, 75 WATTS
853-031556-028
ASSY HEATER CARTRIDGE
853-031556-037
ASSY HEATER CARTRIDGE
853-032776-002
ASSY LAM RESEARCH PADDLE LIFTER
853-032908-608
VALVE ASSY, ISO ANGLE VALVE 1 1/2 HT
853-033271-001
ASSY, ADAPTOR, HTD
853-033854-001
DISTRIBUTION BOX
853-034296-023
CABLE ASSY CA COAX UPR MTCH-GEN 23FT
853-034430-002
CABLE ASSY, H, TURBO CTRL/CTR-VLV INT
853-035784-006
HEATER ASSY CA.HTD LN,MFC INPT LN HTR
853-055048-001
MOTOR VEXTA PH265-02 12V/0.42A
853-056894-050
CABLE ASSY,CA,EMO AC CONT BOX,50'
853-056984-050
CABLE ASSY
853-057109-012
SENSOR ASSY OPTICAL SENSOR
853-100105-031
HARD DISK NEXT O/S REV 3.3 HD QUANTUM SOFTWARE LAM
853-100128-001
HARD DISK QUANTUM HD 5/8/95 TCP1 DATA
853-110629-001
CABLE ASSY CABLE TCU TEMP CAL
853-130027-001
EDGE FINDER ASSEMBLY
853-140013-001
GATE ASSEMBLY OUTER GATE ASSY
853-140018-001
ASSY,HARN,GAP DR ENCD
853-140019-001
SENSOR ASSY, CA,OPTO-SENSOR REPLACED BY (853-140019-002)
853-140223-001
SWITCH ASSY INTK/OPTIK DRIVERS 4520XL
853-170196-100
PNEUMATIC HARN, LWR TBG, GAS PNL, ORB COMPLEET SET
853-190023-001
HARD DISK ASSY,HD DR,IDE W/CONTRLR PCB
853-190126-002
CABLE ASSY CA,KYBD/TRKBL,PYLON
853-190216-001
ASSY,ESC/RF GND PATH (TESTED)
853-190225-001
CABLE ASSY CA E-NET PYLON SMIF
853-190227-001
CABLE ASSY CA DC EMO/LT TWR PYLON
853-190364-001
CABLE ASSY,CA,INTFC,HGP CONT,4520XL
853-190365-001
CABLE ASSY,CA,PMP FL CONT,4520XL
853-190391-001
CABLE COAX CABLE
853-190404-001
SENSOR ASSY , CA,OPT SENSOR
853-190454-001
CABLE ASSY, CA, MATCH EMO
853-190463-060
CABLE ASSY,CA,GEN CART EMO,EMI,90'
853-190468-001
CABLE VIDEO EXTENSION (ENVISION) ASSY
853-190495-060
CABLE ASSY,CA,TCU INTFC,EMI,60'
853-210381-101
BOX HOLDER MINI REV 2
853-220024-003
CABLE
853-220458-001
CABLE ASSY
853-220638-002
CABLE ASSY CABLE
853-220866-002
TEMPERATURE METER + SI SPA ELECTRONIC
853-222835-001
CABLE ASSY, CA,WFR DET
853-330636-001
CABLE ASSY JUMPER , TURBO INTLK
853-330637-001
CABLE ASSY JUMPER TURBO INHIBIT
853-330851-001
CABLE ASSY, HARN STATUS,PUMP,CHMBR
853-331021-001
ASSY,L WDO,QIK CLN,E9400/E9600
853-358869-154
PLUG 14,13MM 2 KANTEN HEATED
853-370398-002
CABLE ASSY,HARN OVERTEMP PADDLE
853-370600-001
CABLE ASSY CABLE MOVING RT1A
853-370724-001
CABLE ASSY HARN,ADPTR,GAS BOX
853-492743-001
CABLE ASSY,CA,LL PMP INTFC
853-492747-001
CABLE ASSY,CA,XDCR,PRESS.,LL,ALLI 6
853-495527-002
COAX ASSY,CA,COAX,RF GEN,4520XL
854-023591-001
BEARING ASSY SPHERICAL BEARING
856-130045-002
KIT RTRKT,WFR SHTL TUBE LONG FRM
856-380309-600
KIT RTRFT ENCP TV 9600PTX A
856-510382-001
KIT RTRFT, VAC SW CABLING
857-010330-001
KIT, HOSE FITTING TCU SHIP KIT
857-094680-100
LIGHT PEN KIT LIGHT PEN, NEXT
857-442024-009
KIT MTG,MFC,AERA FC-D980
860-010176-001
ENCLOSURE AC/DC DISTRIBUTION CONTROL
866-210748-001
KIT UPGRD MANF , APM N2
866-210750-001
KIT, UPGRADE, APM CHUCK, VAC/SW
867-000779-001
KIT RTRFT BLKT HTR BYPASS/FAV
867-190769-001
KIT RTRFT, 4520X SA,EMC
867-330951-021
KIT RETROFIT, ESC MATCH LAM
890-144250-101
PCB SYS68K/CPU-6VB/C3
90-0001-003
WSHR,.26ID X .56OD X .06W NYLON
90-0020-015
SCREW, BH, 1-4-20XS-8, PVC
90-0038-023
SCREW, 8-32X5/8 BHCS, SST
92-0001-008
SPACER,SHAFT, .125X.187X.031
92-0001-026
SPACER,1/4X1/2,.062THK OUTER R
920-006065-001
CONN MALE 1/2 TUBE X 3/8 NPT
920-006142-001
INSERT FTG INSERT 1/2" TUBE NYLON
920-008479-003
PLUG,SMC ONE TOUCH,5/32T
921-002066-003
COUPLING SNEL COUPLING PARKER
921-002560-001
BULKHEAD UNION BULKHEAD #10-32
921-008453-023
FITTING CONNECTOR MALE
921-008770-003
SCREW PLG HEX HOLLOW 7/16-20
921-008973-001
TUBE INSERT NYLON 1/2T OD X 3/8T
921-060053-001
STEM DESCO QUICK-CONN 1/2 FNPT
921-091955-001
ADAPTOR,NIPPLE ISO TO NPT BOX 18
93-229-005
RF CABLE
955-008403-001
PAD SILICONE RUBBER
960-006363-001
GREASE FOMBLIN VAC-3
965-002686-001
GREASE FOMBLIN VAC 3 HESIVE RTV SILICONE CLEAR
990-004350-082
PCB PNEUMATIC
