ASMi spares
Part no Description
632720320 PCB ASM 632720320
800810010 FLOWMETER BROOKS SHO-RATE MODEL 1350/D2H1A1B6C020 FLOWM R6-65A
800905005 SWITCH MICRO 69-10A
808034359 SAFETY LABEL - STICKER HIGH VOLTAGE TRIANGEL
808034928 RELAY, OMRON, MY4N-D2, COILV: 24VDC, 4PDT, 250VAC/5A, PLUG IN.
808035649 CLAMP PE 3/8" TUBING, ASV PE BUISKLEM 10MM
808035746 LIGHT INDICATION 4 STAGE 100MM
808071304 PIN PAR 6M6X20 DIN 7
808082050 CONN JACK-TC CNN22400-SX
830000771 DRY SLIDING BEARING
830002464 U-SEAL NEOPRENE SPONSRUBBER 151
830003428 MAXON MOTOR 44.060.000-00.09-110 CVTR CAROUSEL, 1759641, 110508, WITH HEDS5540-A11 ENCODER
830003436 MAXON DC MOTOR AVAGO ENCODER HEDS-5540
830003452 MAXON MOTOR 40 WATT PLUS TACHO (35:1)
830003487 DIETZ WHR BLOWER DN12Q 230/400V 0,25KW 2880RPM ASSY FAN WHR
830004424 RELAY, SMILL, COILV: 24VDC, 4PDT, 440VAC/6,3A, PLUG IN
830006508 SPRING PRESSURE
830007377 HEAT EXCHANGER CETETHERM CP410-15
830007385 DISPLAY EL512-256-H2-FRB
830008470 PROXIMITY SENSOR CILINDERSENSOR SMEO-4U-K-LED-24
830008551 VALVE REGULATING VALVE, LRMA-QS-6
830008616 QUALIFLOW MFC N2 AFC 202 NC 200SLM
830008624 MASS FLOW CONTROLLER MFC 202 100SLM N2 NC
830010165 SCHUMACHER BUBBLER UNIT 1462-0141A ABU TLC TEMP CNTRL SYSTEM ABSOLUTE
830011048 O-RING AS380 291,47 X 5,33 11.475 ID X .210 C61 THT
830012079 TRAP WATERCOOLED NW100
830012729 RELAY, CONTACTOR, TELEMECANIQUE, LC1-F115 01221, 3PST, 600VAC/175A, PANEL MOUNT.
830012788 TERM BLOCK SAKL4/10KEN 10K POT
830013164 CONNECTOR PNEU MALE 10-32*5/3
830015515 COMPR. SPRING STAINLESS 302, D2.44 DO18.29 LO38.1 A+S, DRUKVEREN
830016171 SPRING EXTENSION 0.5*5 T408
830016880 VALVE 3-WAY PFA 202-22
830016996 CHECK VALVE SS-CHVCR4-10
830021043 SPRING CIRCULAR WAVE
830021078 SPRING 4.57*15.75
830021132 BEARING 15/28 B=7 6902B LLU BOAT ROTATION ELEVATOR ARM PULLEY SKF 61902-RS1
830021787 PBI DANSENSOR MODEL: OXI-2 ASM OXYGEN ANALYZER
830021787 DANSENSOR O2 ANALYZER PBI OXI-2
830022023 HOSE CLAMP 200-210
830023062 FREQUENCY INVERTER 0.75KW ALLEN BRADLEY 160S-AA04NSF1
830023534 SPRING EXTENSION T42240
830031464 FLEXTUBE 3/4" LNG = 1230
830031472 FLEXTUBE 3/4" LNG = 1150
830040900 SWITCH PRESSURE PM2KVS
830041478 COMPRESSION SPRING, D1.3 DO12.19 LO63.5 A+S
830047018 O-RING METRIC 48MM ID X 3MM CS FKM (VITON) 75 SHA
830047115 BARATRON 2 TORR MODEL 622AX02TBE
830061908 SENSOR FLOW VEGA SI1000, ORIGINAL, NEW
830069879 LIGHT TOWER ELEMENT GREEN
830069887 LIGHT TOWER ELEMENT RED
830069895 LIGHT TOWER ELEMENT ORANGE
830069909 LIGHT TOWER ELEMENT BLUE
830090916 PRESSURE CONTROLLER MKS651C
830103767 O-RING 125 X 2 VITON P CUP SPECIAL
830131426 DANSENSOR O2 ANALYZER PBI OXI-4, 0-1000PPM
8300004319 VALVE METERING SS-SS4
8300045562 THERMOSTAT MAN RESET NC ON TCU
8300112257 ACTUATOR JS-151 HO
(NOT SET) PCB ASM -23-27-2014
(NOT SET) PCB ASM 230030190,11 REV. B
(NOT SET) PCB GESPAC MEM-12BC MEM - 12BC
(NOT SET) PCB SBS - 6AH256 GESPAC SBS-6AH256 PC BOARD NIB
(NOT SET) REGULATOR AR2000-02
(NOT SET) WAFER TRANSFER BELT - ELEVATOR DRIVE 160 XL 037
(NOT SET) BELLOWS KIT FOR STAINLESS STEEL AND BRASS BK SERIES BELLOWS-SEALED VALVES WITH 1 SERIES PNEUMATIC ACTUATORS
(NOT SET) REGULATOR PRESSURE REGULATOR
(NOT SET) KIT REPAIR KIT BALL VALVE
(NOT SET) ELECTRICAL EMO SWITCHES
(NOT SET) ELECTRICAL EMO SWITCH LABLES
(NOT SET) RELAY, CONTACTOR, SCHNEIDER ELECTRIC, LC1DT20, COILV: 24VAC, 4PST, 690VAC/20A, INCL, 2XAUX, 1XNO, 1XNC. DIN RAIL/PANEL MOUNT.
(NOT SET) CABLE - GROUND - 2,5MM2 UNIT IS METERS ELECTRICAL
(NOT SET) MECHANICAL PRESSURE GAUGES, C122-30-60-PSI/BAR-VM
(NOT SET) CONNECTOR HOUSING - SUB D - 9 PIN
(NOT SET) O-RING WAFER TRANSFER - DOOR SEAL - VITON, 13.375 OD, 13 X 1 MM SPECIAL
(NOT SET) VALVE NUPRO 1 PSI POPPET CHECK VALVE SS-8C-VCR-1 CAJON VCR
(NOT SET) WAFER TRANSFER PNEUMATIC REGULATOR
(NOT SET) GAS MODULE 316L VAR MICRO-FIT® TRIBOW (TEE+ELBOW), 1/4 IN. OD
(NOT SET) REACTOR LAMP USHIO HALOGEN 120V 1000W FEL REACTOR SPOTLIGHT
(NOT SET) REPAIR KIT - VACUUM VALVE ATM EXHAUST VALVE - RP ISO - MANUAL ISO VALVE
(NOT SET) O-RING VITON WHITE 12,7 X 2,4 SPECIAL
(NOT SET) V-RING FPM V-220 A
(NOT SET) POWER CABLE COMPUMOTOR ZETA 6104 120V
(NOT SET) VALVE APTECH AP3657S 2PW FV4-FV4
(NOT SET) VALVE APTECH AP3657S 2PW FV4-MV4
(NOT SET) GAUGE WIKA 316L 0-100 PSI
(NOT SET) VALVE TREE PH3 APTECH
(NOT SET) VALVE TREE SIH4 APTECH
(NOT SET) VALVE TREE N2 APTECH
(NOT SET) ADVANCED FLOW CONTROL VAPORIZED CONTROLLER LVC 414 - USED
(NOT SET) POTENTIOMETER SCR EPI
(NOT SET) MASS FLOW CONTROLLER UNIT UFC-1661 1.5 SLM O2 SN:5022296
(NOT SET) MASS FLOW CONTROLLER UNIT UFC-1661 5 SCCM PH3 SN:6035460
(NOT SET) MASS FLOW CONTROLLER UNIT UFC-1661 2000 SCCM SIH4 SN:6034845
(NOT SET) SOCKET CRIMP SOCKET MFC CABLE
(NOT SET) POWER MODULE 3 PHASE MONITOR B2644 3-PH PWR MON 208/240V
(NOT SET) EPOXY HARDENER 710 HE 3,8 LITER
(NOT SET) WATERBORNE URETHANE AIR DRY COATING 7107-17875 FS595B WHITE 3,7 LITERS
(NOT SET) MOTOR BLOWER 200/480 VOLT 60HZ MAX AMPS 9.0
(NOT SET) GAS MONITORING SYSTEM + POWER SUPPLY
(NOT SET) SENSOR HCL SENSOR
(NOT SET) SENSOR H2 SENSOR
(NOT SET) LASER RECEIVER SMIF LOAD LOCK
(NOT SET) SENSOR LASER TRANSMITTER SMIF LOAD LOCK + BRACKET
(NOT SET) SMIF WAFER OUT SENSOR SET
(NOT SET) FLOW METER 1/2 FNPT BR VT 5 GPM
(NOT SET) SS POPPET CHECK VALVE, FIXED PRESSURE, 1/4 IN. SWAGELOK VCR FACE SEAL FITTING, 1/3 PSIG (0.03 BAR)
(NOT SET) KEYBOARD A400
(NOT SET) RESISTOR HORSE POWER RESISTOR 0.18 OHM + ARM FUSE ROTATION BOARD
(NOT SET) KIT REPAIR REPAIR KIT BELLOW
(NOT SET) GLOW STARTERS STARTERS 4W-22W 220-240VAC
(NOT SET) POWER MODULE FUSE 25A/250V
(NOT SET) LAMP T5 FLUORESCENT TUBE 14W 840 COOLWHITE HO
(NOT SET) POWER SUPPLY, POWER ONE, CP162-A INPUT: 100-240VAC. OUTPUT: 24VDC/5A, 5VDC/3A W/OVP -5VDC/0.6A W/OVP
(NOT SET) CABLE BNC CABLE 75 OHM PLUG TO PLUG MALE - MALE - 5M - PSG00520 - PRO SIGNAL
(NOT SET) VALVE SWAGELOK 6LV-DAFR4-P-O PNEUMATIC INLINE VALVE
(NOT SET) INTEL P80C32 8BIT CMOS SINGLE CHIP
(NOT SET) BRACKET CONNECTION BLOCK BACK
(NOT SET) DIN RAIL STANDARD MID SECTION COMPONENT BOX
(NOT SET) ENTRELEC END COVER STD FOR COMPONENT BOX
(NOT SET) LATCHES A6 QUARTER TURN TO OPEN LATCHES
(NOT SET) SCREW BUTTON SOCKET W/FLANGE STAINLESS STEEL A2 M4 X 10, ISO7380
(NOT SET) WASHER REPAIR SAE STAINLESS STEEL A2 M4 X 20 X 1,2
(NOT SET) GAS MODULE MANUAL PURGE VALVE 4W FFFM NC
(NOT SET) GAUGE APG ACTIVE PIRANI GAUGES ATMOSPHERE TO 10-4 MBAR
(NOT SET) VACUUM UNIT FOR RP EPSILON
(NOT SET) BARATRON 1000 TORR
(NOT SET) VALVE MAIN VALVE LOADLOCK
(NOT SET) ALIGNMENT KIT A400
(NOT SET) PLATE HIGH TEMP DOOR PLATE
(NOT SET) CONVERTER MCR-C-UI-UI-DCI
(NOT SET) LED SIGNALL 5MM R9-115L ROT 12V DC
(NOT SET) GAS MODULE VALVE - 3 PORT NC FFM DIAPHRAME NEW
(NOT SET) GAS MODULE VALVE - 4 PORT NC FMMM DIAPHRAGMA NEW
(NOT SET) GAS MODULE VALVE - 2 PORT NO FM DIAPHRA
(NOT SET) ADAPTOR 50 IDC PLUG - 68D PLUG
(NOT SET) FUSE FAST ACTING 125V 1.5A DC INTERLOCK BOARD
(NOT SET) FERRULE, INSULATED, 10MM, PK100 E10-12-BROWN - PER 100
(NOT SET) SENSOR FLOW MEASURING DEVICE INLINE-MAGNETIC FLOWMETER PNP-NORMALLY OPEN/CLOSE + 4...20 MA
(NOT SET) PLATE TC-PLATE FOR 150MM
(NOT SET) BARATRON RANGE: 133.32 KPA, 1000 TORR
(NOT SET) CHILLER EPI
(NOT SET) CHILLER EPI
(NOT SET) SCHUMACHER BUBBLER MODEL: DME522, M DOT
(NOT SET) FLOPPY DRIVE EPI EPSILON PANASONIC JU-257A726P 1.44MB
(NOT SET) GATE VALVE HVA GATE VALVE - ATM VALVE
(NOT SET) THROTTLE VALVE RP STACK
(NOT SET) GATE VALVE (VAT)
(NOT SET) BRACKET H2 SENSOR LOADLOCK DOORS RIGHT HANDED
(NOT SET) BRACKET H2 SENSOR LOADLOCK DOORS LEFT HANDED
(NOT SET) FRONT TABLE EPSILON
(NOT SET) M5X10 DIN912 8.8 HEX SOCKET HEAD SCREW, ZINC PLATED
(NOT SET) FUSE 500 V 5A FNQ5
(NOT SET) GEAR ARM EXTEND
(NOT SET) H2 SENSOR INCL GASTECH PCB
(NOT SET) O-RING AS013 VITON BLACK INJECTOR INLET 10,82 X 1,78
(NOT SET) O-RING AS320 VITON BLACK KF25 1-1/8 ID X 3/16 1.100 ID X .210 27.94 ID X 5.33
(NOT SET) O-RING METRIC 88 X 5 MM TUBELATION RP-STACK VITO
(NOT SET) FOXBORO DISPLAY
(NOT SET) PURGE PIPE RH OLD STYLE GATE VALVE
(NOT SET) O-RING KIT CHAMBER CHANGE EPSILON
(NOT SET) POWER SUPPLY, VERO POWER, 116-010066F, INPUT: 115/230VAC, SET TO 110VAC, OUTPUT: 24VDC/2,5A
(NOT SET) ASM A400 OXIDE HT UPGRADE KIT
(NOT SET) ARO INGERSOLL RAND ACCESSORY
(NOT SET) QUARTZ WAND 300MM
(NOT SET) VALVE ANGLE VALVE LEYBOLD 283-13-V1 KF-25
(NOT SET) TUBE 321 STAINLESS STEEL FLEXIBLE TUBING 1/4 IN OD FEMALE VCR BOTH ENDS FLEXIBLE LENGTH BELLOW PURGE LINE
(NOT SET) IC DC INTERLOCK BOARD ULN2804 / PER 10PC
(NOT SET) SCREW GATE VALVE ADJUSTMENT
(NOT SET) CONNECTOR 37 PINS SUB D FEMALE-FEMALE GENDER CHANGER
(NOT SET) SOCKET, IDC, 34WAY 3414-6000
(NOT SET) O-RING AS367 VITON WHITE MPI 189,87 X 5,33 CS FKM 70 SHA
(NOT SET) O-RING AS369 WHITE REAR FLANGE 202,57 X 5,33
(NOT SET) VALVE 2-WAY FM NC HIGHFLOW
(NOT SET) VALVE 2-WAY FF NC BURB VALVE
(NOT SET) GAS MODULE GAUGE - 15 - 0 - 60
(NOT SET) SENSOR HEAD DIGITAL LASER SENSOR HEAD
(NOT SET) SENSOR KEYENCE REFLECTOR FOR LV-H62
(NOT SET) SEAL PERLAST G74P SEAL GATE COMPL
(NOT SET) CONNECTOR, FIRING CIRCUITS, PLUG, 20 POS, 2 ROW: CONNECTOR TYPE: WIRE TO BOARD; S
(NOT SET) CLIPPARD, VALVE ELECTRONIC PNEUMATIC 3WAY N/C 24VDC
(NOT SET) DIAPHRAGM VLV SC-01 CLEAN MALE X FEMALE
(NOT SET) MASS FLOW CONTROLLER MFC CELERITY 3 SLM N2
(NOT SET) MASS FLOW CONTROLLER MFC CELERITY 5 SLM N2
(NOT SET) SWITCH MICROSWITCH, SAFETY, V3, ROLLER ASM MAIN DOOR SWITCH
(NOT SET) O-RING AS260 WHITE VITON V-75-W 164,7 X 3,53
(NOT SET) LOCKOUT TAGOUT ELO-26970 CIRCUIT BREAKER LOCKOUT
(NOT SET) 4.0 INCH, 2-STAGE, PNEUMATIC, UNHEATED VALVES, VALVE ISO VALVE NW 100
(NOT SET) CLEANER PVC CLEANER, PVC-C TANGIT BLIK 1 LTR
(NOT SET) THREADED SLEEVE ABS 11.153.337 PN10 32/25X1"
(NOT SET) TRACKING FILTER ISLATROL TRACKING FILTER 120VAC 7.5A 50/60HZ I-107
(NOT SET) INJECTOR CARTRIDGE 0.063
(NOT SET) H2 HEAD FOR ABOVE WAFER HANDLING
(NOT SET) H2 HEAD FOR INSIDE WAFER HANDLING W/ O-RING SEAL
(NOT SET) RELAY P2HZ PILZ 24VAC 2.5W
(NOT SET) CONNECTOR, POWER TAP, 15A
(NOT SET) PRESSURE SWITCH HIGH PURITY PRESSURE / VACUUM SWITCH
(NOT SET) POWER SUPPLY, VERO ELECTRONICS, MONOVOLT PK60-III, 116-010064A, INPUT: 115-230VAC, OUTPUT: 12VDC/5A
(NOT SET) THERMOCOUPLE TRANSMITTER PC-PROGRAMMABLE TEMPERATURE TRANSX RANGE 0-1600 GRA.C TRY/PRG/4-20MA/10-30DC/-ISE [HPP]
(NOT SET) SEAL LOADLOCK LOWER
(NOT SET) SEAL LOADLOCK UPPER DOUBLE O-RING
(NOT SET) PLUG W/ O-RING 1/4
(NOT SET) CONNECTOR 15 WAY DIN41612 250 BLADE SOCKET
(NOT SET) SCREW BZK ISO7380 SST A2 M5X10
(NOT SET) SCREW BI6K SST A2 UNC 8-32 X 1/2
(NOT SET) SCREW D912 ISO4762 SST A2 M2 X 10
(NOT SET) WIRE ALPHA WIRE 5859/10 WH500 WIRE, WHT 10 AWG, 37/26AWG 30.5M
(NOT SET) CONNECTOR FEMALE D SUB, SOLDER, 25WAY
(NOT SET) FLOW METER COLE-PARMER HC205S-020 SPRING LOADED FLOW METER 6000 PSI ASM EPSILON 3200 WORKS
(NOT SET) BELLOW SECTION TYPE 100763508 NW80 5,9"
(NOT SET) CYLINDER BIMBA PNEUMATIC
(NOT SET) GUIDE RAIL, 19" CHASSIS, BLACK, 160MM 60817-001
(NOT SET) LED HOLDER, 5MM BLACK, RING AND SLEEVE
(NOT SET) CONNECTOR 14 WAY BUMP POLARISED SKT W/STRAIN RELIEF FEMALE
(NOT SET) REGULATOR PRESSURE REGULATOR
(NOT SET) FITTING INCH SIZE ONE-TOUCH (UNF, NPT) UNION "Y"
(NOT SET) FITTING 1/8" ONE-TOUCH (UNF, NPT) STRAIGHT UNION
(NOT SET) FITTING 1/4" ONE-TOUCH (UNF, NPT) STRAIGHT UNION
(NOT SET) FITTING INCH SIZE ONE-TOUCH (UNF, NPT) MALE CONNECTOR
(NOT SET) FITTING INCH SIZE ONE-TOUCH (UNF, NPT) MALE CONNECTOR
(NOT SET) FITTING INCH SIZE ONE-TOUCH (UNF, NPT) UNION TEE
(NOT SET) CONNECTOR ITW FASTEX DOOR STRIKE
(NOT SET) CONNECTOR 34 WAY IDC BUMP POLARISED SOCKET 1A
(NOT SET) CONNECTOR SOCKET IDC PLANAR 12 WAY FEMALE 65801-012LF
(NOT SET) BELLOW KF25 250MM LONG - CLEANED NOT LEAKCHECKED
(NOT SET) J-PIPE (LEFTHANDED)
(NOT SET) GAS DETECTOR H2 RIKEN KEIKI
(NOT SET) BELLOW LOAD LOCK SEAL 245 MM X Ø 44,5 MM
(NOT SET) WAFER SENSOR MIRROR LOADLOCK
(NOT SET) SENSOR H2 0-200 PPM GH-583
(NOT SET) SENSOR NO 0-100 PPM EC-582
(NOT SET) SENSOR NO2 0-15 PPM EC-582
(NOT SET) ASM A400 TI FLANGE SET
(NOT SET) ASSY TRANSPORT TOOL, ASM A400
(NOT SET) INJECTOR
(NOT SET) WAVE SPRING
(NOT SET) ASM E2000 USED GOLD PROCESS KIT
(NOT SET) SPRING TOP GASINLET ASM A400
(NOT SET) QUARTZ INLET ATM-OTS TRANSITION PIECE
(NOT SET) QUARTZ EXHAUST RING ATM
(NOT SET) COVER, TOP EXHAUST ATM
(NOT SET) COVER BOTTOM, EXHAUST, ATM
(NOT SET) SUPPORT HEAT EXCHANGER REACTOR ASM, ADJUSTED TO NEW HEATEX.
(NOT SET) GASPANEL BACKPLANE ASM A400
(NOT SET) BRACKET TEMP. CONTROLLER FLANGE
(NOT SET) HEATER TRAFO P400/S 5-ZONE 21KVA 50HZ
(NOT SET) CONNECTOR D-SUB HOOD 15 WAY
(NOT SET) INSULATED CRIMP BOOTLACE FERRULE 6MM PIN LENGTH
(NOT SET) DUAL THYRISTOR MODULE SCR 95A 800V MCC95-08IO1B
(NOT SET) RED INSULATED CRIMP RECEPTACLE
(NOT SET) TRANSFORMER 230VAC - 45/48/50VAC 50/60HZ
(NOT SET) VAC. LOADLOCK TUBING SET
(NOT SET) SCREW JACK SGT 5 GO-3-24-0-I-S STROKE 50 MM, SPINDLE SGT5GO-3-24-0-I HUB=50
(NOT SET) O-RING 3X2V75, 3MM ID 2MM CS FKM VITON 75SHA
(NOT SET) ECQE6223JF - FILM CAPACITOR, 0.022 ΜF, 630 V, PET (POLYESTER), ± 5%, ECQE(F) SERIES
(NOT SET) KIT, ASM EPSILON AUTODOOR OPTION - PNEUMATIC DOOR MECHANISM
(NOT SET) H2 DETECTOR BOARD MODULE 57-8145-01 REV T, 72-0416-03 REV J
(NOT SET) GESEXT-11 EXTENTION BOARD EPI
(NOT SET) MFC HCL 100 SCCM
(NOT SET) MFC H2 200 SCCM TYLAN FC-260
(NOT SET) MFC HCL 20 SLM
(NOT SET) MFC GEH4 500 SCCM ASM AFC-260
(NOT SET) FAN MUFFIN, MODEL MU2A1, 115V 14W 8.2A HZ50/60
(NOT SET) PASVEER RVS, DIN 6885-4-4-12-A-NI
(NOT SET) PASVEER RVS, DIN 6885-3-3-12-A-NI
(NOT SET) ASSY-TRANSFER ARM WIDE
(NOT SET) LITHIUM PRIMAIRE KNOOPCEL XR1/3N SLF
(NOT SET) TANTALUM; CAP 1 UF;TOL 10%; VOL-RTG 50
(NOT SET) TE CONNECTIVITY MINIATURE RECTANGULAR SERIES CRIMP CONTACT, MALE, 0.12MM² TO 0.9MM², 26AWG TO 18AWG
(NOT SET) KF50SVCR-304, KF CENTERING RING, DN50, STAINLESS STEEL 304/FKM
(NOT SET) BLK STEEL HEX SKT CAP HEAD SCREW, M2X6MM FOR ELEVATOR PROSITION SLIDE
(NOT SET) SHOCK ABSORBER, RUBB.TRILLINGSDEMPER BI/BU, TYPE B RND.25X20-M6
(NOT SET) ROD END BEARING
(NOT SET) MOTOR BRACKET FIX
(NOT SET) BRACKET SENSOR ROTATION
(NOT SET) SOLENOID BANK FESTO VTOC-MSDLT-25V12-1H-Q6RA-US-Q4-A-7K-MET
(NOT SET) SHIM SPACER FOR CARTRIDGE INJECTOR SET
(NOT SET) BARATRON TREE VACUUM LOADLOCKS
(NOT SET) HEAT EXCHANGER DAM
(NOT SET) CHAMBER COVER STAND OFF EPI STANDOFF
(NOT SET) SPOOLPIECE VACUUMLOADLOCKS FOR SLOW VALVE
(NOT SET) H2 BURB SENSOR
(NOT SET) H2 SENSOR WHC
(NOT SET) O-RING WHC COVER
(NOT SET) SPOOLPIECE
(NOT SET) ASSY ORIFICED GASKET NI 0.13MM
(NOT SET) SST ANGULAIR CONTACT BEARING FOR ASM A400 DOORPLATES. SILVERTHIN CSEA 020
(NOT SET) SWAGELOK MANUAL PNEUMATIC DIAFRAGM VALVE NUPRO
(NOT SET) BELLOW FALTENBALG GO-3-24-0-I-S, HUB 50MM
(NOT SET) HEAT TRANSFER COMPOUND THERMON
(NOT SET) AP4 SEAT EXTRACTION
(NOT SET) SEAT INSERTION TOOL AP4
(NOT SET) SEAT EXTRACTION TOOL
(NOT SET) SEAT INSERTION TOOL
(NOT SET) ENDEFFECTOR METAAL 100/150/200MM
(NOT SET) ENDEFFECTOR 100MM
(NOT SET) GASKET VCR 0.013MM
(NOT SET) ELGILOY SEAL KIT FOR DA
(NOT SET) SS BELLOWS SEALED VALVE 1/2IN VCR
(NOT SET) INDUSTRIAL CIRCUIT BREAKER 20A, 3P, 600VAC
(NOT SET) RELAY, CONTACTOR, ALLEN BRADLEY, 100-C12*10, COILV: 24VAC, 4PST, 600VAC/25A, DIN RAIL.
(NOT SET) VALVE SWAGELOK 6LV-DAFR4-C PNEUMATIC INLINE VALVE
(NOT SET) VALVE SWAGELOK 6LV-DAFR4-P-O PNEUMATIC INLINE VALVE
(NOT SET) PRESSURE SWITCH 1.5 BAR G, VCR
(NOT SET) MASS FLOW CONTROLLER TYLAN FC 2911 4V, 20 SLPM N2 VITON
(NOT SET) MASS FLOW CONTROLLER TYLAN FC 2901 4V, 5 SLPM N2 VITON
(NOT SET) MASS FLOW CONTROLLER TYLAN FC-2901V, 100 SCCM O2
(NOT SET) MASS FLOW CONTROLLER BROOKS 5850S 10 SLPM H2
(NOT SET) MASS FLOW CONTROLLER BROOKS 5850S 1.5 SLM O2
(NOT SET) MASS FLOW CONTROLLER BROOKS 5850S 10000 MLN/MIN O2
(NOT SET) TE CONNECTIVITY 30VK6 POWERLINE FILTER 4.2" LENGTH, 30A, 250V AC
(NOT SET) ACME ELECTRIC TRANSFORMER 75VA 1PH OPEN 208/240/277/380/480VAC PRI 24VAC SEC
(NOT SET) ACME ELECTRIC TRANSFORMER 50VA 1PH OPEN 208/240/277/380/480VAC PRI 24VAC SEC
(NOT SET) TRANSFORMER 250VA 1PH OPEN 220-240/ 440-480/ 550-600VAC PRI 120/100 115/95 110/90VAC SEC
(NOT SET) ACME ELECTRIC, INDUSTRIAL CONTROL TRANSFORMER, 1PH, 50/60 HZ, 240/480/600, 230/460/575, 220/440/550VAC PRI, 120/100, 115/95, 110/90VAC SEC
(NOT SET) PBI DANSENSOR MODEL: OXI-3.1 ASM OXYGEN ANALYZER
(NOT SET) SILICONE MANCHET TRANSP 60SH - 78INW/1200MM LG
(NOT SET) WINDOW WIP (SIDE)
(NOT SET) EXTENSION SPRING, D0.46 DO4.57 LO19.05
(NOT SET) COMPRESSION SPRING
(NOT SET) ARTICULATED FOOT D60 SPINDLE S/S M16 L110 NUT S/S ANTIVIBR, LEVELING FOOT 17522
(NOT SET) DANSENSOR O2 ANALYZER PBI OXI-2
(NOT SET) ASSY TC DISTR PANEL, COLD JUNCTION BACK PANEL
(NOT SET) ASCO REDHAT STAINLESS 24VDC SOLENOID VALVE SC B262A138 WATER AIR OIL 1/4" NPT,AIR 5,5 BAR, WATER 4 BAR, L-OIL 4 BAR, 400-425-142 24 DC FT, 11,2W
(NOT SET) ALBERT SCREW JACK SGT5-1-01 STROKE 50 MM, TYPE SGT5/24
(NOT SET) SWAGELOK UNION TEE 1/2
(NOT SET) PROTECTION COVER DUAL MOTOR DRIVER BOARD
(NOT SET) SAFETY LABEL - MOTOR DRIVER BOARDS
(NOT SET) BRACKET SAFETY SWITCH L
(NOT SET) BRACKET SAFETY SWITCH R
(NOT SET) BRACKET SCR
(NOT SET) COMPRESSION SPRING SS 302 D0.8 DO7.1 LO15.5 A
(NOT SET) LAPP CABLE H07V-K 1X6 WT RI100, WHITE, 100M
(NOT SET) TOP COVER CABLE CLAMP
(NOT SET) CABLE DUCT SIDE COVER
(NOT SET) DIETZ ELECTRIC BLOWER 3880388 DN16
(NOT SET) INFRARED EMITTERS SEP8505-003 CAROUSEL SENSOR 15 DEG, T1, 20MA
(NOT SET) CONNECTOR HOUSING, 15W D-SUB SLIM SERIES, SUBD SHELL
(NOT SET) MASS FLOW METER MFM GF100 SERIES GF100CXXM-0013030L-VXVOG1, GF100C-200808, GAS: NITROGEN, 30 SLM
(NOT SET) MASS FLOW METER MFM GF100 SERIES GF100CXXM-00071.5-VXVOG1, GF100C-200809, GAS: HYDROGEN, 1.5 SLM
(NOT SET) ASSY HINGE FOR DOORS
(NOT SET) BRACKET FOR HINGE
(NOT SET) BLOCK FIX BACK 100 CASS
(NOT SET) CASSETTE BRACKET WIP END STOP 4INCH
(NOT SET) CLAMP PE 1/2" TUBING
(NOT SET) SEAL INFLATABLE GATE VALVE 14 X 10 X DL SI OXIGINE RED
(NOT SET) MRL INDUSTRIES EXTERNAL TORCH UNIT 1500W 110/220VAC 0410926743 R12, HEATER
(NOT SET) FAST RAMP BLOWER
(NOT SET) QUARTZ INJECTOR SUPPORT PILLAR POWER POLY
(NOT SET) TC FLANGE
(NOT SET) TRANSFORMER PRIM 480VAC, SEC 230/120VAC, 7KVA
(NOT SET) CONTACTOR MAG 3P 1M+1V 24VAC LC1-D18B7
(NOT SET) ASM A400 FURNACE SYSTEM SN 700450/10
(NOT SET) BALL VALVE TYPE 546 DN15, GF PVDF KOGELKRAAN D20 PN16 FPM MOFLAS 175546412
(NOT SET) FLANGE, SCAVENGER RING
(NOT SET) DRY SLIDING BEARING
(NOT SET) SOKKEL-KLEMBEUGEL / KLEMZADEL TYPE 2962 20-22
02-187742-04 PCB ASSY-FOXBORO-REAR/EPROM
02-320871C01 ASSY TIMING PULLY
02-321042C01 TUBELATION BELLOW ASSY
02-321566C01 GAS MODULE PRESSURE SWITCHES (0-50 PSI)
02-321652D01 ASSY-CASSETTE-HYBRID-200MM-26 WAFER - FOR SMIF APPLICATION
02-321964 EPROM KIT FOXBORO SLAVE OLD TYPE
02-322334B01 ASSY-CA-FAN-TEMP CONTROLLER
02-322858D07 CABLE - ASSY CA VAC INTFC TO RP SENSOR, BELDEN 9542, 20C
02-323029c01 SWITCH PRESSURE SWITCH 1 PSI 10 PSI 20 PSI 40 PSI
02-323387C01 TUBE PRESENT SENSOR J312
02-323584D01 THERMOCOUPLE ASSY QTZ CENTER TC RP DIFFUSE 150/200 G 1.0.8
02-323584D01 EPI THERMOCOUPLE CENTER RP 150/200 G 1.0.8 REV.J
02-323653D01 EPI THERMOCOUPLE ASM REAR 200MM G1.0.8
02-323654D EPI THERMOCOUPLE (SET) 200MM ASSY QUARTZ 02-323652D01 / 02-323653D01 / 02-323654D01
02-323654D01 EPI THERMOCOUPLE ASM,S200,G1.0.8
02-323654D01 ASSY-QTZ SIDE TC RP 200MM
02-323764D01 ASSY SENSOR LOAD LOCK
02-323831d02 VAC INTFC BD-J6, REV G
02-323882D01 ASSY-REFL-S-CENTER-LOWER
02-324555D01 ASSY-WATER FLOW SWITCH
02-324989C01 SENSOR ASSY CA DUAL WAFER OUT SENSOR PZ2-61
02-325413E01 100MM TO 200MM CASSETTE REGISTER PLATE NEW VERSION
02-325685D01 R GEARBOX ASSEMBLY REFURBISHED
02-325961D01 R ARM E2000 TRANSFER ARM
02-326186A02 ASSY-TRANSFER ARM MECH 200MM-RH
02-326489B01-R REFURB-FERROFLUIDIC-ASSY-FEEDTHRU-ROTARY
02-326679D01 ASSY-WAFER WAND-150MM
02-326680D01 WAFER WAND 200MM
02-327875D01 ASSY QUARTZ FRONT SIDE TC 200MM BIJCT
02-328379C01 ASSY-CA-MKS TO THROT VLV INA E6017
02-328466D01 HIGH TEMP CASSETTE EPI 6" TALL (NEW)
02-328466D01 R HIGH TEMP CASSETTE EPI 6" TALL (USED)
02-328950D02 CABLE - ASSY CA VAC INTFC IQ PUMP 100FT
02-329522D06 CASSETTE 6" ASM EPI HIGH TEMP (USED)
02-330556-01 FLANGE ATM (USED/CLEANED)
02-332010D01 HARD DISK SCSI QUANTUM 1.0GB
02-332423-01 GAS MODULE HCL REMOTE SENSOR INCL GASTECH PCB
02-333242D01 ASSY WTA ROTATION MOTOR Z
02-338894D01 ASSY - SYSTEM CONTROLLER E2000
02-339046-01 INJECTOR CARTRIDGE 0.032
02-339048-01 MPI MULTIPORT INJECTOR FLANGE (NEW)
02-352066D01 ASSY-QTZ-TC-F/S-BIJCT-TW-200MM
02-352070D01 ASSY-QTZ TC REAR THK WALL 200MM
02-352072D01 ASSY-QTZ TC SIDE THK WALL 200MM
02-352105D02 ASSY-QTZ TC CENTER SPHER RP
03-186004D02 PCB BOARD OPTIONS I/F 03-329735D02
03-320142D03 INTERFACE ASM EPSILON 3200 EV INTERFACE PNEUMATIC BLOCK 03-320142D03 / 03-188639D01
03-321921D01 PCB-ASSY LAMP CURRENT CHECK TESTED
03-322678C01 PCB ASSY-AUX INTFC BD-040
03-322709A01 PCB ASSY-STANDARD VIDEO GRAPHICS
03-322709A02 PCB ASSY-COMPOSITE VIDEO GRAPHICS
03-322710A02 PCB ASSY-32 DIGIN GESPAC GESINP-2A DIG IN PCB CARD
03-322711A02 PCB ASSY-32 DIGOUT GESPAC GESOUT-3 DIG OUT PCB CARD
03-322711A04 CIRCUIT BOARD GESOUT-3 ASM EPSILON 3200 CIRCUIT BOARD 03-322711A04 REV C
03-322712A02 CIRCUIT BOARD GESDAC-2B-9821 ASM EPSILON 3200 CIRCUIT BOARD 03-322712A02 REV C
03-322712A04 CIRCUIT BOARD GESDAC-2B-9821 ASM EPSILON 3200 CIRCUIT BOARD 03-322712A04 REV C
03-322714A01 PCB ASSY-DUAL SERIAL
03-322715A01 BOARD QUAD SERIAL BOARD
03-322716A01 PCB ASSY MPU
03-322717A01 PCB ASSY DYNAMIC RAM 2MB GESRAM 14C 8946
03-322717A02 RAM PCB GESRAM 14C 9318
03-322718A01 GESPAC GESFDC-3/FDC-3 FLOPPY DISK CONTROLLER
03-322719A01 PCB ASSY BATT RAM
03-322720A01 PCB EPROM CONTROL MEM-14/256
03-323114A02 PCB ASSY-16 ADC GESPAC GESADC-12A ADC PCB CARD
03-323688D01 VACUUM CONTROL INTERFACE BOARD
03-323690D01 DC INTERLOCK II ASSY PCB
03-323820A01 GESPAC CIO-1A
03-325144D01 CIRCUIT BOARD SYSTEM INTERFACE BOARD II 16-323405D01 PCB
03-325997A01 PCB ASSY-GESMEM12BC-RAM/EPROM
03-325997A02 PCB ASSY-GESMEM12BC-EPROM
03-325997A03 PCB ASSY-GESMEM12D-EPROM-68040
03-326607A01 PWBA 03-326607A01 MPL-4332-1-96
03-328189D02 PCB ASSY-SYSTEM INTERFACE BOARD II (03-322678C01 PCB ASSY-AUX INTFC BD-040 NOT INCLUDED)
03-329338A01 PCB ASSY-DISK CONT MPL-4332 W/JUMP
03-330714A01 PCB ASSY-68040 CPU GESSBS-41T16D INSTALLATED EPROMS V6.06
03-331904A01 PCB ASSY FLOPPY SCSI CONTROL GESPAC GESMSC-1 MSC-1 E1 CONTROLLER BOARD 03-331904A01
03-333839A01 GESMEM-12D 68040 MEMORY MODULE BOARD
04-143373-01 RFK VLV 50 122938A38 & 123343A88 TO SWGLK
04-325771A01 KIT FUSE CONTROLLER SECTION
04-326409A01 KIT SPARES O-RING SLOW PMP VALVE
04-328391-01 KIT WIRE EXTENTION SLIP RING
04-330673E03 LASER ASSEMBLY LOAD LOCK
04-331949E09 RFK-SYS CONT-68040 UPGRD W/GEM/SECS PCB HSMS BOARD
04-332466-01 SUSCEPTOR RING BOTTOM RING TOP RING SET 200MM TOSHIBA SUSCEPTOR RING
04-350321-02 KIT MULTIPORT FLANGE O-RING SQR
081220030-01 ASSY OTS SP 1-10SLM, 42V, SERNR:260222
084726113-01 GASPANEL BACKPLANE ASM A400 WET/DRY OX
084726121-01 GASPANEL BACKPLANE ASM A400 FLAT POLY
1127-452-02 ASSY, DTC CONTROLLER, 120VAC
12-7020-0002 FILTER HEPA FILTER AAF E99C9S2P3 12-7020-0002, 12-4020-0002
16-143372-01 SPACER VALVE RETRO TO SWAG
16-320060D01 GATE VALVE SLIT VALVE
16-320089C01 WHEEL SLIT
16-320095B01 PULLEY TIMING
16-320174B02 GASKET RESTRICTOR 5 SLM 1/4" VCR GSKT/W/.021" BORE
16-320174B03 GASKET RESTRICTOR 3 SLM 1/4" VCR GSKT/W/.014" BORE
16-320174B04 GASKET RESTRICTOR 15 SLM GASKET 1/4" VCR GSKT/W/.034" BORE
16-320174B05 GASKET RESTRICTOR 25 SLM 1/4" VCR GSKT/W/.050" BORE
16-320174B08 GASKET RESTRICTOR 2 SLM 1/4" VCR GSKT/W/.010" BORE
16-320298D01 COVER TOP LLC LEXAN TOP COVER LOADLOCK
16-320562D01 REFLECTOR-S OUTSIDE LOWER DUAL PARABOLIC
16-320698e01 R INJECTOR BLADE PART (USED)
16-320705B01 INSERT KNURLUD BRASS LAMP ARRAY
16-320707D01 SUPPORT SUSCEPTOR RING SQUARE
16-320958B01 DETECTOR H2-MODIFIED-WHC & LLC
16-321206B01 WAFER TRANSFER GASKET-WAND MOUNT
16-321410C01 LIFTER SUSCEPTOR SUPPORT QUARTZ
16-321411C01 LIFTER SUSCEPTOR RING QUARTZ
16-321411C01 LIFTER-SUSCEPTOR RING - FLAG TOOLING REMOVAL QTZ
16-321412C01 PULL ROD QUARTZ
16-321450B01 WAFER TRANSFER TUBE-BERNOULLI SUPPLY-RIGHT ARM
16-321450B02 WAFER TRANSFER TUBE-BERNOULLI SUPPLY-LEFT ARM
16-321650e01 100MM TO 200MM CASSETTE REGISTER PLATE 4"-8" OLD VERSION
16-321845C01 SUPPORT SUSCEPTOR RING 200MM
16-321925D01 PCB TEMP CTRLLR BOARD DEFECT NEEDS TESTING
16-322032C01 PLATE ADAPTOR FLOATING WAFER ROT
16-322139C01 GAS MODULE SPOOL PIECE - GAGE MOUNTING
16-322457B01 FERRULE O-RING
16-322471D08 SUSCEPTOR (200)
16-323349C01 WINDOW-SIDE VIEW PORT
16-323481B02-R LUG MOUNTING LOWER
16-323489B01-R LUG
16-323525B01-R DAM LIGHT SIDE
16-323526B01-R DAM LIGHT REAR
16-323855D01 GOLD LAMP REFLECTOR - REFL-S/D-SINGLE PARABOLIC
16-323953C01 INSULATOR END UPPER
16-323957B01 INSULATOR COVER KIT INCL SCREWS
16-323958C01 REFLECTOR - LAMP END COVER - UPPER
16-323959C01 REFL-S-COVER-END-LOWER-LP
16-325001C01 PCB OPTIONS I/F ASSY
16-325264B01 RING COMPRESSION FEEDTHRU
16-325265B01 FLANGE SWIVEL TC EXHAUST FLANGE
16-325424C02 WANDFEET RH 200 MM
16-327052B01 BLOCK HINGE MOUNTING
16-328615D01 REFL-S-CENTER-UPR-LAMP ARRAY
16-328729 XYCARB BOTTOM RING 200MM EPI
16-329545D01/C XYCARB UPPER SLIP RING 200MM EPI
16-329591D01 GAS MODULE CROSSOVER PIECE
16-329899D01 SUPPORT-RING SQUARE CHAMBER #2A
16-330054B09 KIT-PIN-SUSC RING SPRT-.100 LG (1 KIT = 3 PINS)
16-330054B10 KIT-PIN SUSCEPTOR RING SUPPORT .110" REV A (1 KIT = 3 PINS)
16-330054B12 KIT-PIN SUSCEPTOR RING SUPPORT .090" (1 KIT = 3 PINS)
16-330833B01 PIN TIP RULON ALIGNMENT SCREW
16-332419D06 SUSCEPTOR-XYCARB-150MM (NEW NOT IN ORIGINAL PACKING)
16-332808C01 REACTOR REFLECTOR - LOWER LIGHT DAMS - CENTER REAR
16-336164D01 SUPPORT GETTER SQUARE CHAMBER OPEN
16-350722D01 XYCARB TOP RING 200MM EPI
16-351160B01 PIN SUPPORT GETTER
175-0001-001 ISOLATION DISK HEATER TOP PP, 370.0MM OD X 31.0MM ID X 80.0MM HEIGHT. MAERIAL: 3000F RATED AI203.
20-105425A06 WSHR FLT TY-A SS .25
2043467-03 ASSY CABLE FLAT 20P L=3,6M
21-105401A33 SCREW PHS 6-32 X 3/8 SS
21-106876A78 SCREW KNURLED THUMB 8-32 X .500 SS
21-106879A72 SCREW-RHP 6-32 X .250 BRASS
21-106905A03 SCREW-SHC 2-56 X .250 SS
21-106905A16 SCREW
21-106905a20 SCREW -SHC 4-70 X .500 SS
21-106905A35 SCREW-SHC 6-32X.500 SS
21-106905A49 SCREW
21-106905A50 SCREW SHC SS 8-32 X .375
21-106905A50 SCREW SHC 8-32 X .375 SS
21-106905A52 SCREW-SHC 8-32 X .500 SS
21-106905A67 SCREW-SHC 10-32X.375 SS
21-106905A87 SCREW-SHC 1/4-20 X .750 SS
21-106905A89 SCREW SHC 1/4-20 X 1.000 SS
21-106918A41 SCREW-BH 4-40 X .250 SS
21-106923A60 SCREW HEX WSHRHD SLTD 8-32 X 3/8 SS
21-114967A14 SCREW SHC M4 X 10MM SS
21-114967A30 SCREW -SHC M5X16MM SS
21-114967A30 SCREW SHC M5X16MM SS
21-115145A17 SCREW
21-115145A19 SCREW-FH-HEX 4-40 X .4375 SS
2111012-02 BLOCK FILLER #15, HMPE500 NATUREL TUBE CLAMP SPACER 30X15X12MM
22-105425A02 WASHER WSHR -FLT TY-A SS #4
22-105425A02 WASHER
22-105425A04 WASHER WSHR -FLT TY-A SS #8
22-105425A04 WASHER
22-105425A06 WASHER WSHR -FLT TY-A SS .25
22-105425A52 WASHER WSHR -FLT SS #8 .18 X .31 X .04-T
22-105439A03 WASHER FLT BRS #6
22-105439A04 WASHER FLT BRS #8
22-105450A12 WASHER WSHR -SPLT SS #4
22-105450A12 WASHER-SPLT SS #4
22-105450A14 WASHER WSHR -SPLT SS #8
22-105450A14 WSHR SPLT SS # 8
22-105450A15 WASHER
22-105450A23 WASHER WSHR -SPLT SS .50
22-10545A014 WASHER
22-107044A04 WASHER LOCK ET BRS #8
22-107044A04 WASHER
22-114959A04 WASHER WSHR FLAT M5 SS
22-114960A24 WASHER WSHR -SPLT SS M5
22-114960A24 WSHR SPLT M5 SS
23 12 3011/1 PCB ASM 23 12 3011/1
23 27 20320.11 PCB
23 2720.110 PCB ASM 232,720,110
23-105448A04 NUT-HEX 8-32 SS
23-105449A04 NUT HEX 8-32 BRS
2302713-01 ASSY FLANGE CONTROL PANEL
2309580-01 !!MOD BEARING THIN SECTION 50.
232620014.11 PCB ASM 23 26 20014-11
232620022.11 PCB BOARD POWER CONTROL DC/AC R 23 26 20022.11 REV. D
2395029-21 PWBA SER COMM DPC-FPC
2397633-02 ASSY DPC CONTROL CABINET CONTROLLER, REV.B
2411148-21 MOD PWBA PRESSURE INTERF. 2T
2414384-21 PWBA CONVERTER DTC
2500752-01 QTZ BALLOON ATM-OTS
2501082-01 MOUNTING BLOCK FRONT ATM
2501244-01 SUSPENSION/LINER RING LPC
2501252-01 SUSPENSION RING LPC
2502925-01 INLET FAN SYSTEM
2502933-01 INLET FAN SYSTEM
2503514-21 BUSHING BUFFER ELEVATOR ARM
2504774-01 QUARTZ CARRIER BOAT 6" 150MM 125 SLOTS
2504774-01-Z QUARTZ CARRIER 150MM-125MM ASM
2504804-01 QUARTZ PROCESS TUBE LPC
2504804-01 QUARTZ POLY PROCES TUBE ASM
2504812-01 QUARTZ POLY TUBE ASM
2504839-01 QUARTZ PEDESTAL LPC
2504847-01 QUARTZ SLEEVE LPC
2504901-01 SEAL INFLATABLE GATE VALVE 13,5 X 9 X DL SI OXIGINE RED
2505363-01 DETECTION FIN NON BOAT ROT.
2506025-01 FLEXIBLE BRACKET SPINDLE-NUT
2506068-01 BRACKET MOTOR ELEVATOR
2506289-01 BRACKET FOR M5 BOLT IN CORNER
2506394-21 PWBA PRE-AMP PTRH 10-13%
2506408-21 PCB, ANALOG I/O DPC
2506416-21 PWBA POWER SUPPLY
2506432-21 PWBA DIGITAL I/O DPC
2506459-21 PWBA BASIC DPC
2506467-21 PWBA COLD JUNCTION
2506564-21 PWBA PROCESSOR DPC
2506572-21 PWBA SER COMM 8 CHANNELS
2506580-21 PWBA TOUCHSCREEN DISPLAY
2506599-21 PWBA TSD SCAN
2506602-21 PCB, BATTERY BACK-UP
2506610-21 PWBA VOLTAGE REGULATOR
2506629-21 PWBA SER COMM 4 CHANNELS
2506718-21 ASSY PWBA DUAL MOTOR DRIVER
2506726-21 WFC RLC, WAFER CENTER FINDER INTERFACE
2506742-21 PCB PWBA ELEVATOR BOT. POS. CVTR
2506750-21 PWBA ELEVATOR CAROUSEL INTERFACE
2506807-21 PWBA ROBOT ELEVATOR BOTTOM LIMIT
2506823-21 PWBA COMP INTERF RLC
2506831-21 PWBA HILO LIMIT
2507250-13 ASSY DPC 230VAC RS232 4DIG.I
2509385-01 FLANGE BLOWER DN12
2509407-03 SILICONE HOSE A=102 B=50
2509490-03 PLATE QUARTZ PLATE ADAPTER
2509563-01 SHIELDING RING DOOR CLOSURE
2509628-01 DOORPLATE ATM, DOOR SCAVENGER
2509938-01 FILTER CAROUSEL REACTOR, AAF 12-9760-4204 ASTROPAK FILTER, 198X930X44MM
2510200-21 PWBA ANALOG I/O RLC
2510693-01 THERMOCOUPLE TC HGV TYPE K 1/8" ASM FLANGE T/C
2511231-21 PCB, TEMP PROBE TYPE K 0-200
2511339-01 LEVER BLOCK EXHAUST RING
2511347-01 LEVER EXHAUST RING
2511401-01 CLAMP BLOCK EXHAUST RING
2512610-21 PWBA TEMP./RATIO
25130021-01 SUPPORT ANGLE LEFT
2513013-01 DRIPPAN BUBBLER
2513021-01 SUPPORT ANGLE LEFT
2513072-01 SUPPORT ANGLE RIGHT
2513285-21 PWBA DISPLAY SELECTOR
2513722-01 CONNECTION BLOCK BACK
2513730-01 SPECIAL BOLT
2513811-01 CENTERING PIN ATM
2514214-01 SUPPORT HEAT EXCHANGER TOP
2514230-01 SUPPORT HEAT EXCHANGER BOT.
2514346-01 !!COVER COLDJUNCTION BOARD
2514907-01 CLAMP RING TUBE LPC
2515326-01 GAS DIVIDING RING STD LPC
2517523-01 END EFFECTOR L=170 GENMARK
2519127-21 PWBA CAROUSEL POS DETECT
2519232-21 PWBA ASSY-PWBA-RS232/RS422 CONVERSION
2520281-01 ASSY UV-SENSOR A400 OTS TORCH UV-PD105-LI
2523809-01 CLAMP TUBE
2523825-01 ATTACHMENT PLATE
2523841-01 CLAMP HOSE
2525127-01 V-SEAL FOR DOOR 325L FPM
2528002-01 BRACKET TC HEATING ELEMENT LPC
2528533-01 SWITCH MOD. PRESSURE SWITCH 0 BARG
2531860-01 ASSY TOUCHSCREEN DISPLAY DIFF.
2532301-01 ASSY FLEXLINE OTS
2532859-01 CABLE DUCT REACTOR COVER
2532867-01 DUCT CABLE COVER
2532875-01 CABLE DUCT WIP
2532883-01 CABLE DUCT WIP COVER
2533812-01 CABLE DUCT
2533839-01 CABLE DUCT COVER
2533863-21 PWBA ASSY PWBA CASSETTE SENSING SOS
2535505-01 ASSY TUBE EXH ATM INSIDE
2536773-01 MOUNTING FLANGE
2536927-01 WASHER FOR SEAL
2536935-21 ASM PWBA BOAT ROTATION POSITION DETECT; AEC
2536943-01 WASHER FOR SEAL
2536951-21 PWBA BOAT ROT MOTOR INTERFACE
2537125-01 PAWL
2537230-01 ASSY VALVE EXHAUST
2538245-21 PWBA N2 PURGE STOP INTERFACE
2538733-01 CRADLE O2 ANALYZER
2538989-01 SUSPENSION RING LPC - MIDDLE RING
2539004-01 CLAMP RING TUBE LPC - TOP RING, REPLACED BY 2644622-01 (SOS613575)
2540789-01 EXTENDED NIPPLE
2540819-01 ASSY PULLEY BOAT ROTATION .50
2541068-01 PNEUM. BRACKET
2541084-01 !!PLATE CAR HOUSING TOP
2541262-01 SPACER LOADERARM
2546248-01 SPECIAL BOLT M12X1
2546302-01 POINTER SS VALVE EXHAUST
2546493-01 SPECIAL NUT ATM
2546744-01 CONN. BLOCK FRONT ATM/LPC
2548860-21 PWBA DUAL I/O INTERFACE 16-C
2550695-01 NUT FOR VACUUM NIPPLE
2552604-01 DOOR ATM REACTOR (ROTATION)
2553007-01 COVER MOUNTING BLOCK TOP
2554704-01 LOADERARM STD XT
2555646-21 PWBA DATA SWITCH PC-FPD 2-CH
2556979-01 SCAVENGER RING DOORCLOSURE
2559013-01 CLAMPRING PROCESS TUBE
2559021-01 SUSPENSION RING PROCESS TUBE
2561263-01 SUBFRAME HEAT ATM FAST RAMP
2568993-01 BUSH TC
2569418-01 GUIDE PIN
2572990-01 SANDVIK HEAT ELEM A40 LPC-PP, DF826400
2575833-01 HEATSHIELD RING
2575868-01 HEATSHIELD
2575949-01 T/C CONNECTOR BLOCK FEM TYPE R
2578042-01 PLATE HEATER BOTTOM
2578778-01 SHIM RING ATM/ROT THK 0.9
2578786-01 SHIM RING ATM/ROT THK 1.05
2578867-01 FAST RAMP UPGRADE KIT ASM A400
2579138-01A ASM A400 HEATER ELEMENT
2579472-01 HOUSING VALVE EXHAUST PVDF
2580780-01 QUARTZ PROCESS TUBE ATM 1-PC/BR
2580934-01 SIC OUTSIDE LINER HT
2582945-01 BLOCK FIX CASS 100 H BAR
2587289-01 BRACKET CYLINDER II
2587319-01 ACTUATOR LOCK/SENSING II
2587327-01 COVER MOUNTING BLOCK II
2587602-01 USED DOORPLATE LP WET OXIDE HT
2588773-01 QUARTZ PEDESTAL ATM BR ET
2595397-01 FLANGE FEEDTHROUGH
2595605-03 PRESSURE MOD PRESSURE SWITCH 0.6
2596571-01 BLOCK BEARING HANDLE FR
2599325-02 ASSY ORIFICED GASKET NI (500SCCM 0.13MM)
26-106652A45 POWER MODULE FUSE - SCR-ASM STANDARD 60A FAST
2600315-01 ASSEMBLY ELEMENT CONTROL PANEL
2600331-01 TCP/TCU ASSY INCL PROGRAMMED EPROMS TEMPERATURE CONTROL PANEL
2600692-21 RATIO, SUMMING PWBA BASIC
2600781-21 MOD PWBA PRESSURE INTERF. 2T
2600935-01 QTZ OTS BALLOON 1 PIECE 1-10SLM
2602792-21 PWBA MOTOR DRIVE DUAL
2608545-01 GAS DIV RING LPC NG HEATED
2609959-21 MOD PWBA FLOWSUM 3 SLM
2614030-21 MOD PWBA RATIO DCE
2616076-21 MOD PWBA RATIO/SUMMING
2616947-21 MOD PWBA RATIO/SUMMING
2622955-01 GAS DIV RING INJ LP NG
2622963-01 SUSP/LINER RING INJ LP NG
2628341-21 MOD PWBA PRESS INTERF. 2T SPL
2638495-02 ASSY TOUCHSCREEN A400
2661691-21 MOD PWBA RATIO/SUMMING
2665743-21 PWBA OTS SAFETY N-TC SP-750
2673940-01 ASSY MOTOR BOAT ROT A400
2673940-01 ASSY MOTOR BOAT ROT A400 RE25+HEDS5540+GP32B
2809818-01 BTC ASSEMBLY PCB RACK USED
2833042-01 ASSY PUMP TCU
2856735-21 PWBA DIGITAL I/O DPC 8CH
2856972-14 ASSY DPC RS232 4DIG.I
2882035-01 ASSY 316L SS 1/2IN PISTON VALVE 2/2 WAY NO
2894203-21 PWBA PROCESSOR 80C88
2894351-21 PWBA DTC OUTPUT 8-CH
2939649-21 PWBA CPU 68HC12 WITH CAN
2944987-01 GENMARK ROBOT CONTROLLER, WHR CONTROLLER
2976285-21 PWBA ANALOG I/O DPC
2987953-21 MOD PWBA RATIO/SUMMING 5.5%
30-120325A02 COMPUMOTOR AX SERIES, AXL-DRIVE INDEXER-MOTOR DRIVER 30-120325A02
32-107137A01 WIRE TEFLON 22 GA STR WHITE
32-107138A04 WIRE KYNAR 28 GA SOLID GREEN
33-116814A58 PRESSURE SWITCH SERIES 1800 MODEL:1823-2
34-106641A05 VARISTOR MO 175VDC RADIAL
35-106642A21 SCR THYRISTOR # P1050-X2-60
3652513-01-R BRACKET-SPOTLIGHT ADJUST-LH
3652556-01 REFLECTOR - SPOTLAMP SPHERICAL
3657434-02 PITCH SUSCEPTOR XYCARB EPSILON
370-01989 O-RING SPECIAL ID .600 CSD .20 VITON 75DURO BLK
39-105313A06 CONNECTOR HOUSING SOCKET
39-105313A13 CONNECTOR HOUSING PIN
39-106640A18 ADAPTER CA 253B+ TO CB252-2-X CA
39-122777A19 SOCKET SPOT LAMP
41-106657A10 TERMINAL BLOCK END BARRIER
43-105310A23 LAMP SPOT TUNGSTEN HALOGEN
43-105310A43 LAMP RHENIUM ALLOYS HTF 1728
48-106661A54 FILTER-INLINE 1/2
49-106665A33 GAUGE PRES 30" -0-60 PSI KGC C-122 VM
50-120215A14 VALVE SHUTOFF 1/4 TURN .250
50-122938A20 VALVE MNL 1/4TURN Q+ FQ M4 FFFM
50-122938A21 VALVE 2-WAY FM NC
50-122938A38 GAS MODULE VALVE - VALVE-PNEU BLWS-Q+ FNC M2 FF
50-122938A95 GAS MODULE VALVE - 3 PORT NC FMM (BUBBLER BYPASS/TCS VENT/DCS VENT)
50-122938A97 GAS MODULE VALVE - 4 PORT NC FFMM (DOPANT DEPOSIT/LVC VENT)
50-125108A43 GAS MODULE VALVE - 3 PORT NC FFM (DOP VENT)
50-125108A54 GAS MODULE VALVE - 2 PORT NC FF HIGH FLOW 90 DAGREE
51-106816A90 316 SS BLIND FEMALE NUT FOR 1/4 IN. VCO O-RING FACE SEAL FITTING
51-106821A01 FERRULE BACK SS .2520 TUBE
51-106821A07 FERRULE FRONT SS .250 TUBE
51-106836A72 CONNECTOR MALE QIK 10-32 X .125 TU
51-120437A13 NUT HH OF BRS .250 TUBE
51-120437A13 NUT HH CF BRS .250 TUBE
51-120437A14 FERRULE SLEEVE CF BRS .250 TUBE
51-120437A24 TEE QUICK BRS .125 M-NPT X .125 TU
51-122832A11 ADAPTOR SS .500 FNPT X .250 MNPT
53-106246A25 GAS MODULE REGULATOR - (H2/N2)
53-106246A29 GAS MODULE REGULATOR - DOP BACK PRESSURE
53-106246A41 WAFER TRANSFER REGULATOR - BACKPRESSURE WHC - GO 0 - 1 PSIG
53-106246A79 GAS MODULE REGULATOR - HCL FIXED PRESSURE
53-109279A07 KIT STD REPAIR SERIES 44-2600
54-125252A46 MASS FLOW CONTROLLER HORIBA STEC SEC-Z512MGX 500 SCCM H2 MR.MG-04 - NORMALLY OPEN VALVE
60-105904A08 GASKET VCR BLIND
60-105904A10 GASKET -VCR SS SIL PLD .50
60-105904A10 GASKET VCR SS SIL PLD .500
60-105904A18 GASKET -VCR .250 ID .03THK SS SIL PLD
60-105904A18 GASKET HF VCR .25 ID .03THK SS SIL
60-106206A90 O-RING AS029 VITON WHITE 75D FLUORCARBON
60-106206A94 O-RING AS320 VITON WHITE TUBULATION SHAFT SEAL 27,94 X 5,33
60-106206A96 O-RING AS014 ROTATION - SHAFT 2-014/75D WHITE FLUOROCARBON
60-106206A97 O-RING AS264 PROCESS CHAMBER FRONT ATM (WHITE VITON 75D) 190,1 X 3,53
60-119075A06 O-RING AS269 75D BLK-VITON
60-119075A14 O-RING AS010 BLACK VITON COOLING WATER VCO 6,07 ID X 1,78
60-119075A14 O-RING AS010 VITON BLACK 75D
60-119075A18 O-RING AS267 VITON WHITE V-75-W 8.234 ID X .139 C/S 209,14 X 3,53 8-1/4 ID X 1/8
60-119075A31 O-RING AS112 BLACK TC FRONT, SIDE, REAR 2-112/75D BLK-VITON 12,37 X 2,62
60-119075A32 O-RING AS116 BLACK VITON VIEWPORT / MAINTENANCE PORT 18,72 X 2,62
60-119075A45 O-RING AS260 VITON WHITE V-60-W GATE VALVE 164,7 X 3,53
60-119075A56 O-RING AS265 BLACK VITON TC PLATE REAR COVER 196,44 X 3,53
60-119075A72 O-RING AS151 BLACK VITON TUBELATION BELLOW 75,87 X 2,62
60-119075A73 O-RING AS222 BETWEEN LEVELING PLATES 75D BLK VITON 37,69 X 3,53
60-119075A75 O-RING AS224 VITON BLACK FERRO SEAL TO LEVELING PLATE / 44,04 X 3,53
60-122291A20 O-RING AS369 PROCESS CHAMBER REAR RP (WHITE FLUORCARBON 2-369/75D) 202,57 X 5,34
60-122483A01 O-RING 2-367/75D WHT-FLUOROCARBON
60-122483A08 O-RING AS275 VITON BLACK 60D WAFER TRANSFER O-RING - ELEVATOR SEAL PLATE 266,29 X 3,53
60-122483A10 O-RING AS174 BLACK 8.737 ID X .103 C/S 8-3/4 ID X 3/32 221,92 ID X 2.62
60-122483A67 O-RING 6-001/75D WHITE VITON 0.24 ID X 0.04 SPECIAL 6,0 X 1,13 MM
60-122486A02 O-RING AS010 WHITE VITON V-75-W 6,07 X 1,78 FLUOROCARBON
61-106751A03 ROTATION BELT - ROTATION DRIVE 140 XL 037
61-106751A04 TIMING BELT BELT 225MXL025 NG TRANSFER ARM ROTATION
632720140.00 PCB DIGITAL I/O MK2 ZE9512
75-106672A33 COVER HOLE PLUG FLUSH .490/.515"
76-106767A73 TOOL EPROM COPY FUNCTION
804S0102 ASM PROCESS TUBE DOOR SWITCH
815019-216 CABLE ADAPTOR FOR CONTROLLER 252-2
830003240 / 2530856-01 VENT CAPTOR 3201.01 AIR FLOW SENSOR V-CAP EF240-3201.01 S101 NPN 24VDC
8300178-01 SWITCH MICRO SAFETY BVM3FYR
87-87700261 REGULATOR APTECH AP1010S 2PW MV4-MV4 SCMK
88-50795-01 FRU,HANDOFF MODULE STD(IFTA)
88-88100018 VALVE AP3550S APTECH 2PW FV4-FV4 (7)
88-88100030 VALVE AP3550S APTECH 2PW FV4-MV4 (5)
88-88500565 VALVE AP4550S APTECH 2PW FV4-FV4
89-106286A09 KIT-MULTIPORT FLANGE O-RINGS LUBRICANT HIGH VACUUM GREASE 150G
90-107386A22 KEYBOARD-RS232 LOW GREW S
90-123159A06 VIDEO GRAPHIC BOARD GESVIG-4W 9118
90-123159A39 FOXBORO PCB F/S/R/ K0143AA REV
98-98102326 VALVE APTECH AP4550SM 3PW MV4-FV4-TW4
99-50152-04 GRIPPER ASSY GRIPPER HSG-04 BOTTOM
A3612302230 PCB THYRISTOR CONTROLLER ASM REV A 36 12 302230.00
A631230220.00 PCB ANALOG INPUT CONVERTER ASM REV A 63 12 30220.00
FA0800326 TEMPERATURE CONTROLLER MP-888 INPUT: 210-240VAC OUTPUT: 0-10V
GB0101100 RELAY, CONTACTOR, SCHNEIDER ELECTRIC, LC1D18, COILV: 230VAC, 3PST, 690V/32A, DIN RAIL. INCL, 2X AUX, 1XNO, 1XNC.
SERV.454.19241 FILTER PARTICLES FILTER 7UM
SS-4BK-V51-1C VALVE SS BELLOWS-SEALED VALVE, GASKETED, PCTFE STEM TIP, 1/4 IN. FEMALE SWAGELOK VCR FITTING, SC-11 CLEANED, NC ACTUATOR
SS-BN8FR8 VALVE 316L SS HIGH-PURITY BELLOWS-SEALED VALVE, 1/2 IN. FEMALE SWAGELOK VCR METAL GASKET FACE SEAL FITTING, NO ACTUATOR
SS-BN8VCR8-2C VALVE 316L SS HIGH-PURITY BELLOWS-SEALED VALVE, 1/2 IN. MALE VCR FITTING, NC ACTUATOR, 1/8-27 NPT INLET
X50363-01 RING BACKSIDE
!!MOTOR CVTR CAROUSEL 44.060.000-00.09-102
HEAT EXCHANGER UNEX PBU10-14
CONCEALED HINGE R-43 - AISI30
