ASM Epsilon Repair Exchange Service

When people talk about semiconductor manufacturing equipment, they often make associations with complex electronics. But in fact the reality is that the mechanics like wafer handling, gas distribution and process kits have a much bigger impact on how a system actually performs. Our team consists of in-house precision mechanics and electronic engineers that carry out sub-assembly refurbishments and improvements. And together with our partners we develop solutions to improve the overall system and process performance.   

Examples are :

  • ASM Epsilon MPI injector calibrations carried out in-house on our own test bench.
  • ASM transfer arm refurbishment with improved arm bearings that reduce sag and single feed N2.
  • ASM Gearboxes with improved bearing setup. 
  • SCR refurbishment, or exchange for our digital SCR’s 
  • Quartz process chambers repairs