About Solutions on Silicon BV

Solutions on Silicon is the smart and flexible partner of choice in the Semiconductor/MEMS industry for equipment and process support.


SoS focuses on continuous improvement of equipment and process performance by investing in R&D in order to achieve 
operational excellence of semiconductor processes and
hardware performance.


We are a company of highly experienced engineers and technicians in the high-tech world of semiconductors and related fields.
We provide turnkey Semiconductor/MEMS Equipment for Dry-Etch, Ion Implant, Epitaxy, RTP, PVD and (PE)CVD technologies.
We also offer advanced upgrades enabling you to increase the productivity of your current tool sets.


SoS continues where most OEM's stop. We develop alternative solutions on 4,5,6,8 and 12 inch (legacy) equipment.